JPS5660895A - Evacuation system of electron microscope - Google Patents

Evacuation system of electron microscope

Info

Publication number
JPS5660895A
JPS5660895A JP13794579A JP13794579A JPS5660895A JP S5660895 A JPS5660895 A JP S5660895A JP 13794579 A JP13794579 A JP 13794579A JP 13794579 A JP13794579 A JP 13794579A JP S5660895 A JPS5660895 A JP S5660895A
Authority
JP
Japan
Prior art keywords
molecular pump
bellows
onto
pump
vibration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13794579A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6113114B2 (enrdf_load_stackoverflow
Inventor
Hiroyuki Kitajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP13794579A priority Critical patent/JPS5660895A/ja
Publication of JPS5660895A publication Critical patent/JPS5660895A/ja
Publication of JPS6113114B2 publication Critical patent/JPS6113114B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
  • Vibration Prevention Devices (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP13794579A 1979-10-25 1979-10-25 Evacuation system of electron microscope Granted JPS5660895A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13794579A JPS5660895A (en) 1979-10-25 1979-10-25 Evacuation system of electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13794579A JPS5660895A (en) 1979-10-25 1979-10-25 Evacuation system of electron microscope

Publications (2)

Publication Number Publication Date
JPS5660895A true JPS5660895A (en) 1981-05-26
JPS6113114B2 JPS6113114B2 (enrdf_load_stackoverflow) 1986-04-11

Family

ID=15210369

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13794579A Granted JPS5660895A (en) 1979-10-25 1979-10-25 Evacuation system of electron microscope

Country Status (1)

Country Link
JP (1) JPS5660895A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59154900U (ja) * 1983-03-31 1984-10-17 株式会社島津製作所 タ−ボ分子ポンプの据付構造
JPS59221482A (ja) * 1983-05-31 1984-12-13 Akashi Seisakusho Co Ltd 真空装置排気系の防振装置
US5325893A (en) * 1991-10-04 1994-07-05 Tokushu Paper Mfg. Co., Ltd. Air duct and paper therefor
WO2009147894A1 (ja) * 2008-06-05 2009-12-10 株式会社日立ハイテクノロジーズ イオンビーム装置

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006041113A1 (ja) * 2004-10-15 2006-04-20 Boc Edwards Japan Limited ダンパおよび真空ポンプ
CN111115530B (zh) * 2018-10-30 2022-05-10 楚天科技股份有限公司 一种瓶体称重装置

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59154900U (ja) * 1983-03-31 1984-10-17 株式会社島津製作所 タ−ボ分子ポンプの据付構造
JPS59221482A (ja) * 1983-05-31 1984-12-13 Akashi Seisakusho Co Ltd 真空装置排気系の防振装置
US5325893A (en) * 1991-10-04 1994-07-05 Tokushu Paper Mfg. Co., Ltd. Air duct and paper therefor
WO2009147894A1 (ja) * 2008-06-05 2009-12-10 株式会社日立ハイテクノロジーズ イオンビーム装置
JP5097823B2 (ja) * 2008-06-05 2012-12-12 株式会社日立ハイテクノロジーズ イオンビーム装置
US8779380B2 (en) 2008-06-05 2014-07-15 Hitachi High-Technologies Corporation Ion beam device
US9508521B2 (en) 2008-06-05 2016-11-29 Hitachi High-Technologies Corporation Ion beam device

Also Published As

Publication number Publication date
JPS6113114B2 (enrdf_load_stackoverflow) 1986-04-11

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