JPS52112275A - Impurity attachment method to substrate - Google Patents

Impurity attachment method to substrate

Info

Publication number
JPS52112275A
JPS52112275A JP2898176A JP2898176A JPS52112275A JP S52112275 A JPS52112275 A JP S52112275A JP 2898176 A JP2898176 A JP 2898176A JP 2898176 A JP2898176 A JP 2898176A JP S52112275 A JPS52112275 A JP S52112275A
Authority
JP
Japan
Prior art keywords
substrate
attachment method
impurity
impurity attachment
cylinder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2898176A
Other languages
Japanese (ja)
Inventor
Daijiro Kudo
Kazufumi Nakayama
Haruo Shimoda
Mikio Takagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP2898176A priority Critical patent/JPS52112275A/en
Publication of JPS52112275A publication Critical patent/JPS52112275A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To perform impurity attachment onto the substrate by securing balance between inactive gas pressure and impurity vapor pressure through partitioning inside of the cylinder into two continuous rooms by the balancer which has slightly smaller outer diameter than inner diameter of cavity cylinder.
COPYRIGHT: (C)1977,JPO&Japio
JP2898176A 1976-03-17 1976-03-17 Impurity attachment method to substrate Pending JPS52112275A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2898176A JPS52112275A (en) 1976-03-17 1976-03-17 Impurity attachment method to substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2898176A JPS52112275A (en) 1976-03-17 1976-03-17 Impurity attachment method to substrate

Publications (1)

Publication Number Publication Date
JPS52112275A true JPS52112275A (en) 1977-09-20

Family

ID=12263580

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2898176A Pending JPS52112275A (en) 1976-03-17 1976-03-17 Impurity attachment method to substrate

Country Status (1)

Country Link
JP (1) JPS52112275A (en)

Similar Documents

Publication Publication Date Title
JPS52155420A (en) Gas enclosing method for enclosing type cylinder
JPS53107516A (en) Airtight connection structure
JPS5376271A (en) Gas spring
JPS5364121A (en) Control valves for exhaust reflux devices
JPS5329672A (en) Gas etching apparatus
JPS52112275A (en) Impurity attachment method to substrate
JPS529103A (en) Double shell high temperature and pressure slurry pump
JPS51140201A (en) Oil pressure production equipment
JPS53105648A (en) Air clutch
JPS527046A (en) Detector of consumption and breakage of electrode
JPS53125848A (en) Heat pipe roll
JPS5264808A (en) Aural analyzing unit
JPS51120480A (en) Gas centrifugac separator
JPS5334018A (en) Negative pressure delaying valve
JPS51121812A (en) The vibration proof apparatus of a compressor
JPS51115183A (en) Continuous packaging by gas replacement
JPS51121811A (en) The vibration proof apparatus of a compressor
JPS5276728A (en) Pressure prevention valve
JPS51142972A (en) Manufacturing method of discharge display panel
JPS535790A (en) A ir-tight sealing
JPS548896A (en) Wall-through bushing
JPS52115416A (en) Totally-enclosed type motor-compressor
JPS5320108A (en) Enclosed compressor
JPS5330012A (en) Screw compressor
JPS51137006A (en) The structure of a low pressure turbine