JPS52112275A - Impurity attachment method to substrate - Google Patents
Impurity attachment method to substrateInfo
- Publication number
- JPS52112275A JPS52112275A JP2898176A JP2898176A JPS52112275A JP S52112275 A JPS52112275 A JP S52112275A JP 2898176 A JP2898176 A JP 2898176A JP 2898176 A JP2898176 A JP 2898176A JP S52112275 A JPS52112275 A JP S52112275A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- attachment method
- impurity
- impurity attachment
- cylinder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To perform impurity attachment onto the substrate by securing balance between inactive gas pressure and impurity vapor pressure through partitioning inside of the cylinder into two continuous rooms by the balancer which has slightly smaller outer diameter than inner diameter of cavity cylinder.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2898176A JPS52112275A (en) | 1976-03-17 | 1976-03-17 | Impurity attachment method to substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2898176A JPS52112275A (en) | 1976-03-17 | 1976-03-17 | Impurity attachment method to substrate |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52112275A true JPS52112275A (en) | 1977-09-20 |
Family
ID=12263580
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2898176A Pending JPS52112275A (en) | 1976-03-17 | 1976-03-17 | Impurity attachment method to substrate |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52112275A (en) |
-
1976
- 1976-03-17 JP JP2898176A patent/JPS52112275A/en active Pending
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