JPS5329672A - Gas etching apparatus - Google Patents

Gas etching apparatus

Info

Publication number
JPS5329672A
JPS5329672A JP10400376A JP10400376A JPS5329672A JP S5329672 A JPS5329672 A JP S5329672A JP 10400376 A JP10400376 A JP 10400376A JP 10400376 A JP10400376 A JP 10400376A JP S5329672 A JPS5329672 A JP S5329672A
Authority
JP
Japan
Prior art keywords
etching apparatus
gas etching
etching
gas
resins
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10400376A
Other languages
Japanese (ja)
Inventor
Yasuhiro Horiike
Masahiro Shibagaki
Takashi Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP10400376A priority Critical patent/JPS5329672A/en
Publication of JPS5329672A publication Critical patent/JPS5329672A/en
Pending legal-status Critical Current

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  • Drying Of Semiconductors (AREA)

Abstract

PURPOSE: To prolong the life of a gas etching apparatus by making an etching chamber, etching gas transporting system and supporting members within the etching chamber through the use of fluorine resins or covering these with said resins.
COPYRIGHT: (C)1978,JPO&Japio
JP10400376A 1976-08-31 1976-08-31 Gas etching apparatus Pending JPS5329672A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10400376A JPS5329672A (en) 1976-08-31 1976-08-31 Gas etching apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10400376A JPS5329672A (en) 1976-08-31 1976-08-31 Gas etching apparatus

Publications (1)

Publication Number Publication Date
JPS5329672A true JPS5329672A (en) 1978-03-20

Family

ID=14369089

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10400376A Pending JPS5329672A (en) 1976-08-31 1976-08-31 Gas etching apparatus

Country Status (1)

Country Link
JP (1) JPS5329672A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5623745A (en) * 1979-08-01 1981-03-06 Hitachi Ltd Plasma etching device
JPS5648099A (en) * 1979-09-25 1981-05-01 Tokyo Ohka Kogyo Co Ltd Electrode for generating plasma for sheet type plasma reaction processor
JPS5699848U (en) * 1979-12-27 1981-08-06
JPS56133009U (en) * 1980-03-11 1981-10-08
JPS5779620A (en) * 1980-11-05 1982-05-18 Mitsubishi Electric Corp Plasma etching process
JPS6220298A (en) * 1985-07-19 1987-01-28 富士通株式会社 Microwave plasma processing method and apparatus
JPS62280308A (en) * 1986-05-30 1987-12-05 Mitsui Mining & Smelting Co Ltd Production of fine silver-palladium alloy power
JPH01286315A (en) * 1988-05-12 1989-11-17 Tokyo Electron Ltd Ashing device

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5623745A (en) * 1979-08-01 1981-03-06 Hitachi Ltd Plasma etching device
JPS5648099A (en) * 1979-09-25 1981-05-01 Tokyo Ohka Kogyo Co Ltd Electrode for generating plasma for sheet type plasma reaction processor
JPH0241167B2 (en) * 1979-09-25 1990-09-14 Tokyo Ohka Kogyo Co Ltd
JPS5699848U (en) * 1979-12-27 1981-08-06
JPS56133009U (en) * 1980-03-11 1981-10-08
JPS6144818Y2 (en) * 1980-03-11 1986-12-17
JPS5779620A (en) * 1980-11-05 1982-05-18 Mitsubishi Electric Corp Plasma etching process
JPS6220298A (en) * 1985-07-19 1987-01-28 富士通株式会社 Microwave plasma processing method and apparatus
JPS62280308A (en) * 1986-05-30 1987-12-05 Mitsui Mining & Smelting Co Ltd Production of fine silver-palladium alloy power
JPH0135044B2 (en) * 1986-05-30 1989-07-24 Mitsui Mining & Smelting Co
JPH01286315A (en) * 1988-05-12 1989-11-17 Tokyo Electron Ltd Ashing device

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