JPS61124565A - テルルまたはテルル合金タ−ゲツト材の製造方法 - Google Patents

テルルまたはテルル合金タ−ゲツト材の製造方法

Info

Publication number
JPS61124565A
JPS61124565A JP24564384A JP24564384A JPS61124565A JP S61124565 A JPS61124565 A JP S61124565A JP 24564384 A JP24564384 A JP 24564384A JP 24564384 A JP24564384 A JP 24564384A JP S61124565 A JPS61124565 A JP S61124565A
Authority
JP
Japan
Prior art keywords
tellurium
target material
alloy
container
powder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP24564384A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0355547B2 (enrdf_load_stackoverflow
Inventor
Masatoshi Fukushima
正俊 福島
Kosaburo Ko
廣　幸三郎
Soichi Fukui
福井　総一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Metal Corp
Original Assignee
Mitsubishi Metal Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Metal Corp filed Critical Mitsubishi Metal Corp
Priority to JP24564384A priority Critical patent/JPS61124565A/ja
Publication of JPS61124565A publication Critical patent/JPS61124565A/ja
Publication of JPH0355547B2 publication Critical patent/JPH0355547B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/12—Both compacting and sintering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Powder Metallurgy (AREA)
  • Physical Vapour Deposition (AREA)
JP24564384A 1984-11-20 1984-11-20 テルルまたはテルル合金タ−ゲツト材の製造方法 Granted JPS61124565A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24564384A JPS61124565A (ja) 1984-11-20 1984-11-20 テルルまたはテルル合金タ−ゲツト材の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24564384A JPS61124565A (ja) 1984-11-20 1984-11-20 テルルまたはテルル合金タ−ゲツト材の製造方法

Publications (2)

Publication Number Publication Date
JPS61124565A true JPS61124565A (ja) 1986-06-12
JPH0355547B2 JPH0355547B2 (enrdf_load_stackoverflow) 1991-08-23

Family

ID=17136701

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24564384A Granted JPS61124565A (ja) 1984-11-20 1984-11-20 テルルまたはテルル合金タ−ゲツト材の製造方法

Country Status (1)

Country Link
JP (1) JPS61124565A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02115364A (ja) * 1988-10-22 1990-04-27 Dowa Mining Co Ltd テルルターゲット及びその製法
US5244623A (en) * 1991-05-10 1993-09-14 Ferro Corporation Method for isostatic pressing of formed powder, porous powder compact, and composite intermediates

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57203771A (en) * 1981-06-10 1982-12-14 Mitsubishi Metal Corp Manufacture of target for vapor-deposition

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57203771A (en) * 1981-06-10 1982-12-14 Mitsubishi Metal Corp Manufacture of target for vapor-deposition

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02115364A (ja) * 1988-10-22 1990-04-27 Dowa Mining Co Ltd テルルターゲット及びその製法
US5244623A (en) * 1991-05-10 1993-09-14 Ferro Corporation Method for isostatic pressing of formed powder, porous powder compact, and composite intermediates

Also Published As

Publication number Publication date
JPH0355547B2 (enrdf_load_stackoverflow) 1991-08-23

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