JPH0372153B2 - - Google Patents

Info

Publication number
JPH0372153B2
JPH0372153B2 JP60066170A JP6617085A JPH0372153B2 JP H0372153 B2 JPH0372153 B2 JP H0372153B2 JP 60066170 A JP60066170 A JP 60066170A JP 6617085 A JP6617085 A JP 6617085A JP H0372153 B2 JPH0372153 B2 JP H0372153B2
Authority
JP
Japan
Prior art keywords
target material
powder
density
alloy
sputtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60066170A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61227167A (ja
Inventor
Masatoshi Fukushima
Kosaburo Suehiro
Soichi Fukui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Materials Corp
Original Assignee
Mitsubishi Materials Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Materials Corp filed Critical Mitsubishi Materials Corp
Priority to JP60066170A priority Critical patent/JPS61227167A/ja
Publication of JPS61227167A publication Critical patent/JPS61227167A/ja
Publication of JPH0372153B2 publication Critical patent/JPH0372153B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Optical Record Carriers And Manufacture Thereof (AREA)
  • Manufacturing Optical Record Carriers (AREA)
  • Thermal Transfer Or Thermal Recording In General (AREA)
  • Physical Vapour Deposition (AREA)
JP60066170A 1985-03-29 1985-03-29 焼結合金タ−ゲツト材 Granted JPS61227167A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60066170A JPS61227167A (ja) 1985-03-29 1985-03-29 焼結合金タ−ゲツト材

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60066170A JPS61227167A (ja) 1985-03-29 1985-03-29 焼結合金タ−ゲツト材

Publications (2)

Publication Number Publication Date
JPS61227167A JPS61227167A (ja) 1986-10-09
JPH0372153B2 true JPH0372153B2 (enrdf_load_stackoverflow) 1991-11-15

Family

ID=13308103

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60066170A Granted JPS61227167A (ja) 1985-03-29 1985-03-29 焼結合金タ−ゲツト材

Country Status (1)

Country Link
JP (1) JPS61227167A (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS621146A (ja) * 1985-06-27 1987-01-07 Toyo Soda Mfg Co Ltd 光記録用スパツタリングタ−ゲツト及びその製造方法
JPS6395983A (ja) * 1986-10-14 1988-04-26 Mitsubishi Kasei Corp 光学的記録用媒体の製造方法
JPS63143258A (ja) * 1986-12-05 1988-06-15 Mitsubishi Metal Corp スパツタリング用タ−ゲツト
EP1480209B1 (en) * 2002-02-25 2009-04-01 Nippon Mining & Metals Co., Ltd. Method for producing a sputtering target
JP4497228B2 (ja) * 2008-05-01 2010-07-07 ソニー株式会社 光記録媒体及びその製造方法、並びに、スパッタリング用のターゲット及びその製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57203771A (en) * 1981-06-10 1982-12-14 Mitsubishi Metal Corp Manufacture of target for vapor-deposition

Also Published As

Publication number Publication date
JPS61227167A (ja) 1986-10-09

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees