JPS61111544A - エツチング方法 - Google Patents

エツチング方法

Info

Publication number
JPS61111544A
JPS61111544A JP59233453A JP23345384A JPS61111544A JP S61111544 A JPS61111544 A JP S61111544A JP 59233453 A JP59233453 A JP 59233453A JP 23345384 A JP23345384 A JP 23345384A JP S61111544 A JPS61111544 A JP S61111544A
Authority
JP
Japan
Prior art keywords
etching
oxide film
wiring
contact
contact hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59233453A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0416011B2 (OSRAM
Inventor
Akinori Shimizu
了典 清水
Misao Saga
佐賀　操
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP59233453A priority Critical patent/JPS61111544A/ja
Publication of JPS61111544A publication Critical patent/JPS61111544A/ja
Publication of JPH0416011B2 publication Critical patent/JPH0416011B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P50/00—

Landscapes

  • Weting (AREA)
JP59233453A 1984-11-06 1984-11-06 エツチング方法 Granted JPS61111544A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59233453A JPS61111544A (ja) 1984-11-06 1984-11-06 エツチング方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59233453A JPS61111544A (ja) 1984-11-06 1984-11-06 エツチング方法

Publications (2)

Publication Number Publication Date
JPS61111544A true JPS61111544A (ja) 1986-05-29
JPH0416011B2 JPH0416011B2 (OSRAM) 1992-03-19

Family

ID=16955272

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59233453A Granted JPS61111544A (ja) 1984-11-06 1984-11-06 エツチング方法

Country Status (1)

Country Link
JP (1) JPS61111544A (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9290695B2 (en) 2013-04-19 2016-03-22 Joled Inc Method for manufacturing a thin-film semiconductor device using an etching solution for an aluminum oxide film

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5956482A (ja) * 1982-08-30 1984-03-31 Daikin Ind Ltd エツチング剤組成物

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5956482A (ja) * 1982-08-30 1984-03-31 Daikin Ind Ltd エツチング剤組成物

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9290695B2 (en) 2013-04-19 2016-03-22 Joled Inc Method for manufacturing a thin-film semiconductor device using an etching solution for an aluminum oxide film

Also Published As

Publication number Publication date
JPH0416011B2 (OSRAM) 1992-03-19

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