JPS6258543B2 - - Google Patents
Info
- Publication number
- JPS6258543B2 JPS6258543B2 JP12156980A JP12156980A JPS6258543B2 JP S6258543 B2 JPS6258543 B2 JP S6258543B2 JP 12156980 A JP12156980 A JP 12156980A JP 12156980 A JP12156980 A JP 12156980A JP S6258543 B2 JPS6258543 B2 JP S6258543B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- oxide film
- wiring
- aluminum
- groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12156980A JPS5745949A (en) | 1980-09-02 | 1980-09-02 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12156980A JPS5745949A (en) | 1980-09-02 | 1980-09-02 | Manufacture of semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5745949A JPS5745949A (en) | 1982-03-16 |
| JPS6258543B2 true JPS6258543B2 (OSRAM) | 1987-12-07 |
Family
ID=14814471
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12156980A Granted JPS5745949A (en) | 1980-09-02 | 1980-09-02 | Manufacture of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5745949A (OSRAM) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1991006792A1 (en) * | 1989-10-25 | 1991-05-16 | Miura Research Co. | Shutter of pressure vessel |
-
1980
- 1980-09-02 JP JP12156980A patent/JPS5745949A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5745949A (en) | 1982-03-16 |
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