JPS6039749A - 走査電子顕微鏡 - Google Patents

走査電子顕微鏡

Info

Publication number
JPS6039749A
JPS6039749A JP58147887A JP14788783A JPS6039749A JP S6039749 A JPS6039749 A JP S6039749A JP 58147887 A JP58147887 A JP 58147887A JP 14788783 A JP14788783 A JP 14788783A JP S6039749 A JPS6039749 A JP S6039749A
Authority
JP
Japan
Prior art keywords
sample
tilting
scanning
signal
axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58147887A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0460298B2 (enrdf_load_stackoverflow
Inventor
Kenji Obara
健二 小原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Jeol Ltd
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, Nippon Telegraph and Telephone Corp filed Critical Jeol Ltd
Priority to JP58147887A priority Critical patent/JPS6039749A/ja
Publication of JPS6039749A publication Critical patent/JPS6039749A/ja
Publication of JPH0460298B2 publication Critical patent/JPH0460298B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP58147887A 1983-08-12 1983-08-12 走査電子顕微鏡 Granted JPS6039749A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58147887A JPS6039749A (ja) 1983-08-12 1983-08-12 走査電子顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58147887A JPS6039749A (ja) 1983-08-12 1983-08-12 走査電子顕微鏡

Publications (2)

Publication Number Publication Date
JPS6039749A true JPS6039749A (ja) 1985-03-01
JPH0460298B2 JPH0460298B2 (enrdf_load_stackoverflow) 1992-09-25

Family

ID=15440438

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58147887A Granted JPS6039749A (ja) 1983-08-12 1983-08-12 走査電子顕微鏡

Country Status (1)

Country Link
JP (1) JPS6039749A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6385860U (enrdf_load_stackoverflow) * 1986-11-26 1988-06-04
JPS63228556A (ja) * 1987-03-18 1988-09-22 Hitachi Ltd 走査電子顕微鏡およびその試料台移動方法
JP2007066710A (ja) * 2005-08-31 2007-03-15 Sii Nanotechnology Inc 荷電粒子ビーム装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6385860U (enrdf_load_stackoverflow) * 1986-11-26 1988-06-04
JPS63228556A (ja) * 1987-03-18 1988-09-22 Hitachi Ltd 走査電子顕微鏡およびその試料台移動方法
JP2007066710A (ja) * 2005-08-31 2007-03-15 Sii Nanotechnology Inc 荷電粒子ビーム装置
KR101249134B1 (ko) * 2005-08-31 2013-03-29 에스아이아이 나노 테크놀로지 가부시키가이샤 하전 입자빔 장치

Also Published As

Publication number Publication date
JPH0460298B2 (enrdf_load_stackoverflow) 1992-09-25

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