JPH0223972B2 - - Google Patents

Info

Publication number
JPH0223972B2
JPH0223972B2 JP57053561A JP5356182A JPH0223972B2 JP H0223972 B2 JPH0223972 B2 JP H0223972B2 JP 57053561 A JP57053561 A JP 57053561A JP 5356182 A JP5356182 A JP 5356182A JP H0223972 B2 JPH0223972 B2 JP H0223972B2
Authority
JP
Japan
Prior art keywords
screen
sample
scanning
center
moving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57053561A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58169763A (ja
Inventor
Kenji Obara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP57053561A priority Critical patent/JPS58169763A/ja
Publication of JPS58169763A publication Critical patent/JPS58169763A/ja
Publication of JPH0223972B2 publication Critical patent/JPH0223972B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP57053561A 1982-03-30 1982-03-30 定移動ズ−ム装置 Granted JPS58169763A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57053561A JPS58169763A (ja) 1982-03-30 1982-03-30 定移動ズ−ム装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57053561A JPS58169763A (ja) 1982-03-30 1982-03-30 定移動ズ−ム装置

Publications (2)

Publication Number Publication Date
JPS58169763A JPS58169763A (ja) 1983-10-06
JPH0223972B2 true JPH0223972B2 (enrdf_load_stackoverflow) 1990-05-28

Family

ID=12946221

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57053561A Granted JPS58169763A (ja) 1982-03-30 1982-03-30 定移動ズ−ム装置

Country Status (1)

Country Link
JP (1) JPS58169763A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100730797B1 (ko) * 2006-02-03 2007-06-20 고영창 아파트 세대별 층간 외벽용 방화장치

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60238996A (ja) * 1984-05-11 1985-11-27 株式会社アポロメック 回数券式磁気カ−ドおよびその使用装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100730797B1 (ko) * 2006-02-03 2007-06-20 고영창 아파트 세대별 층간 외벽용 방화장치

Also Published As

Publication number Publication date
JPS58169763A (ja) 1983-10-06

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