JPS6363110B2 - - Google Patents

Info

Publication number
JPS6363110B2
JPS6363110B2 JP57035520A JP3552082A JPS6363110B2 JP S6363110 B2 JPS6363110 B2 JP S6363110B2 JP 57035520 A JP57035520 A JP 57035520A JP 3552082 A JP3552082 A JP 3552082A JP S6363110 B2 JPS6363110 B2 JP S6363110B2
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JP
Japan
Prior art keywords
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Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57035520A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58152356A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP57035520A priority Critical patent/JPS58152356A/ja
Publication of JPS58152356A publication Critical patent/JPS58152356A/ja
Publication of JPS6363110B2 publication Critical patent/JPS6363110B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP57035520A 1982-03-05 1982-03-05 ズ−ムウオブラ Granted JPS58152356A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57035520A JPS58152356A (ja) 1982-03-05 1982-03-05 ズ−ムウオブラ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57035520A JPS58152356A (ja) 1982-03-05 1982-03-05 ズ−ムウオブラ

Publications (2)

Publication Number Publication Date
JPS58152356A JPS58152356A (ja) 1983-09-09
JPS6363110B2 true JPS6363110B2 (enrdf_load_stackoverflow) 1988-12-06

Family

ID=12444021

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57035520A Granted JPS58152356A (ja) 1982-03-05 1982-03-05 ズ−ムウオブラ

Country Status (1)

Country Link
JP (1) JPS58152356A (enrdf_load_stackoverflow)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52154151U (enrdf_load_stackoverflow) * 1976-05-19 1977-11-22
JPS5824901B2 (ja) * 1978-02-20 1983-05-24 日本電子株式会社 走査電子顕微鏡

Also Published As

Publication number Publication date
JPS58152356A (ja) 1983-09-09

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