JPH0232741B2 - - Google Patents

Info

Publication number
JPH0232741B2
JPH0232741B2 JP57063097A JP6309782A JPH0232741B2 JP H0232741 B2 JPH0232741 B2 JP H0232741B2 JP 57063097 A JP57063097 A JP 57063097A JP 6309782 A JP6309782 A JP 6309782A JP H0232741 B2 JPH0232741 B2 JP H0232741B2
Authority
JP
Japan
Prior art keywords
sample
signal
moving
scanning
circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57063097A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58178949A (ja
Inventor
Kenji Obara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP57063097A priority Critical patent/JPS58178949A/ja
Publication of JPS58178949A publication Critical patent/JPS58178949A/ja
Publication of JPH0232741B2 publication Critical patent/JPH0232741B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP57063097A 1982-04-15 1982-04-15 試料像表示装置 Granted JPS58178949A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57063097A JPS58178949A (ja) 1982-04-15 1982-04-15 試料像表示装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57063097A JPS58178949A (ja) 1982-04-15 1982-04-15 試料像表示装置

Publications (2)

Publication Number Publication Date
JPS58178949A JPS58178949A (ja) 1983-10-20
JPH0232741B2 true JPH0232741B2 (enrdf_load_stackoverflow) 1990-07-23

Family

ID=13219452

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57063097A Granted JPS58178949A (ja) 1982-04-15 1982-04-15 試料像表示装置

Country Status (1)

Country Link
JP (1) JPS58178949A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63266745A (ja) * 1987-04-24 1988-11-02 Nikon Corp 試料像の視野移動装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5829571B2 (ja) * 1978-02-27 1983-06-23 日本電子株式会社 電子顕微鏡における試料移動装置

Also Published As

Publication number Publication date
JPS58178949A (ja) 1983-10-20

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