JPS6337941B2 - - Google Patents

Info

Publication number
JPS6337941B2
JPS6337941B2 JP57086263A JP8626382A JPS6337941B2 JP S6337941 B2 JPS6337941 B2 JP S6337941B2 JP 57086263 A JP57086263 A JP 57086263A JP 8626382 A JP8626382 A JP 8626382A JP S6337941 B2 JPS6337941 B2 JP S6337941B2
Authority
JP
Japan
Prior art keywords
scanning
sample
horizontal
moving
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57086263A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58204455A (ja
Inventor
Kenji Obara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP57086263A priority Critical patent/JPS58204455A/ja
Publication of JPS58204455A publication Critical patent/JPS58204455A/ja
Publication of JPS6337941B2 publication Critical patent/JPS6337941B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP57086263A 1982-05-20 1982-05-20 移動試料観察装置 Granted JPS58204455A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57086263A JPS58204455A (ja) 1982-05-20 1982-05-20 移動試料観察装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57086263A JPS58204455A (ja) 1982-05-20 1982-05-20 移動試料観察装置

Publications (2)

Publication Number Publication Date
JPS58204455A JPS58204455A (ja) 1983-11-29
JPS6337941B2 true JPS6337941B2 (enrdf_load_stackoverflow) 1988-07-27

Family

ID=13881926

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57086263A Granted JPS58204455A (ja) 1982-05-20 1982-05-20 移動試料観察装置

Country Status (1)

Country Link
JP (1) JPS58204455A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002270128A (ja) * 2001-03-09 2002-09-20 Seiko Instruments Inc 集束イオンビーム装置およびそれを用いた加工方法

Also Published As

Publication number Publication date
JPS58204455A (ja) 1983-11-29

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