JPH0360150B2 - - Google Patents

Info

Publication number
JPH0360150B2
JPH0360150B2 JP58021242A JP2124283A JPH0360150B2 JP H0360150 B2 JPH0360150 B2 JP H0360150B2 JP 58021242 A JP58021242 A JP 58021242A JP 2124283 A JP2124283 A JP 2124283A JP H0360150 B2 JPH0360150 B2 JP H0360150B2
Authority
JP
Japan
Prior art keywords
sample
rotation
scanning
bright line
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58021242A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59148255A (ja
Inventor
Kenji Obara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP58021242A priority Critical patent/JPS59148255A/ja
Publication of JPS59148255A publication Critical patent/JPS59148255A/ja
Publication of JPH0360150B2 publication Critical patent/JPH0360150B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP58021242A 1983-02-10 1983-02-10 走査電子顕微鏡 Granted JPS59148255A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58021242A JPS59148255A (ja) 1983-02-10 1983-02-10 走査電子顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58021242A JPS59148255A (ja) 1983-02-10 1983-02-10 走査電子顕微鏡

Publications (2)

Publication Number Publication Date
JPS59148255A JPS59148255A (ja) 1984-08-24
JPH0360150B2 true JPH0360150B2 (enrdf_load_stackoverflow) 1991-09-12

Family

ID=12049579

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58021242A Granted JPS59148255A (ja) 1983-02-10 1983-02-10 走査電子顕微鏡

Country Status (1)

Country Link
JP (1) JPS59148255A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61104549A (ja) * 1984-10-29 1986-05-22 Jeol Ltd 電子顕微鏡
CN111451823B (zh) 2013-03-06 2022-11-29 Wto公司 用于切割工具的涡轮机驱动的动力单元

Also Published As

Publication number Publication date
JPS59148255A (ja) 1984-08-24

Similar Documents

Publication Publication Date Title
JP3859396B2 (ja) 走査型荷電粒子ビーム装置における試料像観察方法及び走査型荷電粒子ビーム装置
JPH073774B2 (ja) 電子顕微鏡
JPH0360150B2 (enrdf_load_stackoverflow)
EP1061551B1 (en) Scanning charged-particle beam instrument and method of observing specimen image therewith
JPH07262950A (ja) 走査形電子顕微鏡
JPS6020439A (ja) 荷電粒子線装置における試料回転装置
JP3876129B2 (ja) 透過型電子顕微鏡
JP2006190567A (ja) 電子線装置
JPS6240815B2 (enrdf_load_stackoverflow)
JPH0343742B2 (enrdf_load_stackoverflow)
JPH02253550A (ja) 荷電粒子ビーム装置
JPS62195840A (ja) 走査電子顕微鏡
JPH0232739B2 (enrdf_load_stackoverflow)
JPS6039749A (ja) 走査電子顕微鏡
JP2804932B2 (ja) ステレオ像観察撮影装置
JP3125297B2 (ja) 荷電粒子線装置
JP2001015058A (ja) 走査型荷電粒子ビーム装置における試料像観察方法及び装置
JP3914787B2 (ja) 電子顕微鏡
JPS6337549A (ja) 荷電粒子線装置
JPH0425803Y2 (enrdf_load_stackoverflow)
JP2001236913A (ja) 試料移動装置
JPH11283548A (ja) 電子顕微鏡装置及びそれを用いた試料観察方法
JPS59201352A (ja) 電子顕微鏡における観察視野の記録及び表示装置
JPS63266745A (ja) 試料像の視野移動装置
JPH01151146A (ja) 走査形電子顕微鏡