JPS59148255A - 走査電子顕微鏡 - Google Patents

走査電子顕微鏡

Info

Publication number
JPS59148255A
JPS59148255A JP58021242A JP2124283A JPS59148255A JP S59148255 A JPS59148255 A JP S59148255A JP 58021242 A JP58021242 A JP 58021242A JP 2124283 A JP2124283 A JP 2124283A JP S59148255 A JPS59148255 A JP S59148255A
Authority
JP
Japan
Prior art keywords
sample
rotation
scanning
bright line
mark
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58021242A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0360150B2 (enrdf_load_stackoverflow
Inventor
Kenji Obara
健二 小原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Jeol Ltd
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, Nippon Telegraph and Telephone Corp filed Critical Jeol Ltd
Priority to JP58021242A priority Critical patent/JPS59148255A/ja
Publication of JPS59148255A publication Critical patent/JPS59148255A/ja
Publication of JPH0360150B2 publication Critical patent/JPH0360150B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP58021242A 1983-02-10 1983-02-10 走査電子顕微鏡 Granted JPS59148255A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58021242A JPS59148255A (ja) 1983-02-10 1983-02-10 走査電子顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58021242A JPS59148255A (ja) 1983-02-10 1983-02-10 走査電子顕微鏡

Publications (2)

Publication Number Publication Date
JPS59148255A true JPS59148255A (ja) 1984-08-24
JPH0360150B2 JPH0360150B2 (enrdf_load_stackoverflow) 1991-09-12

Family

ID=12049579

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58021242A Granted JPS59148255A (ja) 1983-02-10 1983-02-10 走査電子顕微鏡

Country Status (1)

Country Link
JP (1) JPS59148255A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61104549A (ja) * 1984-10-29 1986-05-22 Jeol Ltd 電子顕微鏡
US10265817B2 (en) 2013-03-06 2019-04-23 SFI Alpha Spin Ltd. Turbine driven power unit for a cutting tool

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61104549A (ja) * 1984-10-29 1986-05-22 Jeol Ltd 電子顕微鏡
US10265817B2 (en) 2013-03-06 2019-04-23 SFI Alpha Spin Ltd. Turbine driven power unit for a cutting tool
US10414007B2 (en) 2013-03-06 2019-09-17 SFI Alpha Spin Ltd. Turbine driven power unit for a cutting tool
US11020833B2 (en) 2013-03-06 2021-06-01 Wto, Inc. Turbine driven power unit for a cutting tool

Also Published As

Publication number Publication date
JPH0360150B2 (enrdf_load_stackoverflow) 1991-09-12

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