JPS58169763A - 定移動ズ−ム装置 - Google Patents
定移動ズ−ム装置Info
- Publication number
- JPS58169763A JPS58169763A JP57053561A JP5356182A JPS58169763A JP S58169763 A JPS58169763 A JP S58169763A JP 57053561 A JP57053561 A JP 57053561A JP 5356182 A JP5356182 A JP 5356182A JP S58169763 A JPS58169763 A JP S58169763A
- Authority
- JP
- Japan
- Prior art keywords
- screen
- sample
- moving
- scanning
- center
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57053561A JPS58169763A (ja) | 1982-03-30 | 1982-03-30 | 定移動ズ−ム装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57053561A JPS58169763A (ja) | 1982-03-30 | 1982-03-30 | 定移動ズ−ム装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS58169763A true JPS58169763A (ja) | 1983-10-06 |
JPH0223972B2 JPH0223972B2 (enrdf_load_stackoverflow) | 1990-05-28 |
Family
ID=12946221
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP57053561A Granted JPS58169763A (ja) | 1982-03-30 | 1982-03-30 | 定移動ズ−ム装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58169763A (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60238996A (ja) * | 1984-05-11 | 1985-11-27 | 株式会社アポロメック | 回数券式磁気カ−ドおよびその使用装置 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100730797B1 (ko) * | 2006-02-03 | 2007-06-20 | 고영창 | 아파트 세대별 층간 외벽용 방화장치 |
-
1982
- 1982-03-30 JP JP57053561A patent/JPS58169763A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60238996A (ja) * | 1984-05-11 | 1985-11-27 | 株式会社アポロメック | 回数券式磁気カ−ドおよびその使用装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0223972B2 (enrdf_load_stackoverflow) | 1990-05-28 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP1061551B1 (en) | Scanning charged-particle beam instrument and method of observing specimen image therewith | |
JPS58169763A (ja) | 定移動ズ−ム装置 | |
JP2000162504A (ja) | 拡大観察装置 | |
JPH07262950A (ja) | 走査形電子顕微鏡 | |
US4006357A (en) | Apparatus for displaying image of specimen | |
JPS63307652A (ja) | 電子顕微鏡の焦点位置検出装置 | |
JPS59148254A (ja) | 走査電子顕微鏡等の試料移動装置 | |
JPS58152356A (ja) | ズ−ムウオブラ | |
JPH0425803Y2 (enrdf_load_stackoverflow) | ||
JPH0238366Y2 (enrdf_load_stackoverflow) | ||
JPS6162015A (ja) | マイクロマニピユレ−シヨン装置 | |
JP2000100366A (ja) | 走査電子顕微鏡 | |
JPS59201354A (ja) | 電子顕微鏡 | |
JPH07130321A (ja) | 走査形電子顕微鏡 | |
JPH0935673A (ja) | 集束イオンビーム装置 | |
JPH0782827B2 (ja) | 荷電粒子を用いた顕微鏡の試料位置調整装置 | |
JPH02215035A (ja) | 試料像表示装置 | |
JPS6039749A (ja) | 走査電子顕微鏡 | |
JPH10149793A (ja) | カーソル制御方法および装置 | |
JP2000306538A (ja) | 荷電粒子ビーム走査型画像表示装置 | |
JPH02262227A (ja) | 電子顕微鏡 | |
JPH0313701B2 (enrdf_load_stackoverflow) | ||
JP2001015058A (ja) | 走査型荷電粒子ビーム装置における試料像観察方法及び装置 | |
JPS61143931A (ja) | 走査形分析装置の多視野観察方式 | |
JPH05144399A (ja) | 走査電子顕微鏡 |