JPS60259938A - 欠陥認識装置 - Google Patents

欠陥認識装置

Info

Publication number
JPS60259938A
JPS60259938A JP59116039A JP11603984A JPS60259938A JP S60259938 A JPS60259938 A JP S60259938A JP 59116039 A JP59116039 A JP 59116039A JP 11603984 A JP11603984 A JP 11603984A JP S60259938 A JPS60259938 A JP S60259938A
Authority
JP
Japan
Prior art keywords
mask
light
data
calculated
blocks
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59116039A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0429021B2 (enrdf_load_stackoverflow
Inventor
Koji Oki
沖　光二
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Electric Works Co Ltd
Original Assignee
Matsushita Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Works Ltd filed Critical Matsushita Electric Works Ltd
Priority to JP59116039A priority Critical patent/JPS60259938A/ja
Publication of JPS60259938A publication Critical patent/JPS60259938A/ja
Publication of JPH0429021B2 publication Critical patent/JPH0429021B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Image Processing (AREA)
  • Closed-Circuit Television Systems (AREA)
  • Image Analysis (AREA)
JP59116039A 1984-06-06 1984-06-06 欠陥認識装置 Granted JPS60259938A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59116039A JPS60259938A (ja) 1984-06-06 1984-06-06 欠陥認識装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59116039A JPS60259938A (ja) 1984-06-06 1984-06-06 欠陥認識装置

Publications (2)

Publication Number Publication Date
JPS60259938A true JPS60259938A (ja) 1985-12-23
JPH0429021B2 JPH0429021B2 (enrdf_load_stackoverflow) 1992-05-15

Family

ID=14677210

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59116039A Granted JPS60259938A (ja) 1984-06-06 1984-06-06 欠陥認識装置

Country Status (1)

Country Link
JP (1) JPS60259938A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02133883A (ja) * 1988-11-15 1990-05-23 Matsushita Electric Works Ltd 外観検査方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4962178A (enrdf_load_stackoverflow) * 1972-09-20 1974-06-17

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4962178A (enrdf_load_stackoverflow) * 1972-09-20 1974-06-17

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02133883A (ja) * 1988-11-15 1990-05-23 Matsushita Electric Works Ltd 外観検査方法

Also Published As

Publication number Publication date
JPH0429021B2 (enrdf_load_stackoverflow) 1992-05-15

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Legal Events

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