JPS60223111A - 半導体ウェーハ用収納ケース - Google Patents

半導体ウェーハ用収納ケース

Info

Publication number
JPS60223111A
JPS60223111A JP59078451A JP7845184A JPS60223111A JP S60223111 A JPS60223111 A JP S60223111A JP 59078451 A JP59078451 A JP 59078451A JP 7845184 A JP7845184 A JP 7845184A JP S60223111 A JPS60223111 A JP S60223111A
Authority
JP
Japan
Prior art keywords
cartridge
main body
case
storage case
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59078451A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0462460B2 (cg-RX-API-DMAC10.html
Inventor
Takeo Sato
武夫 佐藤
Hiroto Nagatomo
長友　宏人
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP59078451A priority Critical patent/JPS60223111A/ja
Publication of JPS60223111A publication Critical patent/JPS60223111A/ja
Publication of JPH0462460B2 publication Critical patent/JPH0462460B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P95/00—
JP59078451A 1984-04-20 1984-04-20 半導体ウェーハ用収納ケース Granted JPS60223111A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59078451A JPS60223111A (ja) 1984-04-20 1984-04-20 半導体ウェーハ用収納ケース

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59078451A JPS60223111A (ja) 1984-04-20 1984-04-20 半導体ウェーハ用収納ケース

Publications (2)

Publication Number Publication Date
JPS60223111A true JPS60223111A (ja) 1985-11-07
JPH0462460B2 JPH0462460B2 (cg-RX-API-DMAC10.html) 1992-10-06

Family

ID=13662398

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59078451A Granted JPS60223111A (ja) 1984-04-20 1984-04-20 半導体ウェーハ用収納ケース

Country Status (1)

Country Link
JP (1) JPS60223111A (cg-RX-API-DMAC10.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012036206A1 (ja) * 2010-09-17 2012-03-22 富士電機株式会社 ウェハ収納具、及びウェハカセットの収納ケース
CN103021914A (zh) * 2012-12-21 2013-04-03 上海宏力半导体制造有限公司 防止晶圆中心部分下垂的晶舟

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5311427A (en) * 1976-07-19 1978-02-01 American Safety Equip Safetyybelt retractor
JPS5315252U (cg-RX-API-DMAC10.html) * 1976-07-19 1978-02-08
JPS5343019A (en) * 1976-09-30 1978-04-18 Nippon Steel Corp Refining method for steel with reduced slag formation
JPS5758760U (cg-RX-API-DMAC10.html) * 1980-09-25 1982-04-07
JPS58158440U (ja) * 1982-04-16 1983-10-22 沖電気工業株式会社 ウエハ洗浄装置
JPS58175628U (ja) * 1982-05-19 1983-11-24 三菱マテリアル株式会社 半導体ウエ−ハの包装容器
JPS5961942A (ja) * 1982-10-01 1984-04-09 Hitachi Ltd 薄板キヤリア治具

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5311427A (en) * 1976-07-19 1978-02-01 American Safety Equip Safetyybelt retractor
JPS5315252U (cg-RX-API-DMAC10.html) * 1976-07-19 1978-02-08
JPS5343019A (en) * 1976-09-30 1978-04-18 Nippon Steel Corp Refining method for steel with reduced slag formation
JPS5758760U (cg-RX-API-DMAC10.html) * 1980-09-25 1982-04-07
JPS58158440U (ja) * 1982-04-16 1983-10-22 沖電気工業株式会社 ウエハ洗浄装置
JPS58175628U (ja) * 1982-05-19 1983-11-24 三菱マテリアル株式会社 半導体ウエ−ハの包装容器
JPS5961942A (ja) * 1982-10-01 1984-04-09 Hitachi Ltd 薄板キヤリア治具

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012036206A1 (ja) * 2010-09-17 2012-03-22 富士電機株式会社 ウェハ収納具、及びウェハカセットの収納ケース
CN103069558A (zh) * 2010-09-17 2013-04-24 富士电机株式会社 晶片收纳装置和晶片盒收纳箱
CN103021914A (zh) * 2012-12-21 2013-04-03 上海宏力半导体制造有限公司 防止晶圆中心部分下垂的晶舟

Also Published As

Publication number Publication date
JPH0462460B2 (cg-RX-API-DMAC10.html) 1992-10-06

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term