JPS60214408A - 磁気ヘッドの製造方法 - Google Patents
磁気ヘッドの製造方法Info
- Publication number
- JPS60214408A JPS60214408A JP7117584A JP7117584A JPS60214408A JP S60214408 A JPS60214408 A JP S60214408A JP 7117584 A JP7117584 A JP 7117584A JP 7117584 A JP7117584 A JP 7117584A JP S60214408 A JPS60214408 A JP S60214408A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic pole
- magnetic
- thin film
- resist
- thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 3
- 239000010409 thin film Substances 0.000 claims abstract description 51
- 239000000126 substance Substances 0.000 claims description 7
- 239000004020 conductor Substances 0.000 claims description 4
- 238000000151 deposition Methods 0.000 claims description 2
- 238000010030 laminating Methods 0.000 claims description 2
- 238000009826 distribution Methods 0.000 claims 1
- 239000010408 film Substances 0.000 abstract description 13
- 238000000034 method Methods 0.000 abstract description 13
- 239000000758 substrate Substances 0.000 abstract description 8
- 239000007788 liquid Substances 0.000 abstract description 5
- 238000004544 sputter deposition Methods 0.000 abstract description 3
- 239000000463 material Substances 0.000 abstract description 2
- 239000010935 stainless steel Substances 0.000 abstract description 2
- 229910001220 stainless steel Inorganic materials 0.000 abstract description 2
- 238000005530 etching Methods 0.000 description 4
- 239000011368 organic material Substances 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 229910010272 inorganic material Inorganic materials 0.000 description 3
- 239000011147 inorganic material Substances 0.000 description 3
- 229910000889 permalloy Inorganic materials 0.000 description 3
- 239000004642 Polyimide Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 230000035699 permeability Effects 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 238000000992 sputter etching Methods 0.000 description 2
- 206010011732 Cyst Diseases 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- QZPSXPBJTPJTSZ-UHFFFAOYSA-N aqua regia Chemical compound Cl.O[N+]([O-])=O QZPSXPBJTPJTSZ-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 208000031513 cyst Diseases 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 230000005415 magnetization Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
- 229910000702 sendust Inorganic materials 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Magnetic Heads (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7117584A JPS60214408A (ja) | 1984-04-10 | 1984-04-10 | 磁気ヘッドの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7117584A JPS60214408A (ja) | 1984-04-10 | 1984-04-10 | 磁気ヘッドの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60214408A true JPS60214408A (ja) | 1985-10-26 |
| JPH0320808B2 JPH0320808B2 (enrdf_load_stackoverflow) | 1991-03-20 |
Family
ID=13453060
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7117584A Granted JPS60214408A (ja) | 1984-04-10 | 1984-04-10 | 磁気ヘッドの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60214408A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01243212A (ja) * | 1988-03-24 | 1989-09-27 | Fujitsu Ltd | 薄膜磁気ヘッドの製造方法 |
-
1984
- 1984-04-10 JP JP7117584A patent/JPS60214408A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01243212A (ja) * | 1988-03-24 | 1989-09-27 | Fujitsu Ltd | 薄膜磁気ヘッドの製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0320808B2 (enrdf_load_stackoverflow) | 1991-03-20 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |