JPS6018912A - 真空蒸着による薄膜形成方法 - Google Patents
真空蒸着による薄膜形成方法Info
- Publication number
- JPS6018912A JPS6018912A JP12819183A JP12819183A JPS6018912A JP S6018912 A JPS6018912 A JP S6018912A JP 12819183 A JP12819183 A JP 12819183A JP 12819183 A JP12819183 A JP 12819183A JP S6018912 A JPS6018912 A JP S6018912A
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- crucible
- evaporation
- width
- supporting material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title claims description 8
- 238000007738 vacuum evaporation Methods 0.000 title claims description 6
- 230000015572 biosynthetic process Effects 0.000 title claims description 3
- 239000000463 material Substances 0.000 claims abstract description 55
- 238000010894 electron beam technology Methods 0.000 claims abstract description 22
- 238000001704 evaporation Methods 0.000 claims abstract description 21
- 230000008020 evaporation Effects 0.000 claims abstract description 21
- 230000008021 deposition Effects 0.000 claims abstract description 7
- 229920006254 polymer film Polymers 0.000 claims abstract description 5
- 239000010408 film Substances 0.000 claims description 20
- 238000000034 method Methods 0.000 claims description 9
- 239000000758 substrate Substances 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 4
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 230000001105 regulatory effect Effects 0.000 claims description 4
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 238000001816 cooling Methods 0.000 abstract description 9
- 238000007740 vapor deposition Methods 0.000 description 26
- 230000000052 comparative effect Effects 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000001771 vacuum deposition Methods 0.000 description 5
- 238000000151 deposition Methods 0.000 description 4
- 238000010408 sweeping Methods 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- -1 polyethylene terephthalate Polymers 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 241001255849 Telecrates Species 0.000 description 1
- NMFHJNAPXOMSRX-PUPDPRJKSA-N [(1r)-3-(3,4-dimethoxyphenyl)-1-[3-(2-morpholin-4-ylethoxy)phenyl]propyl] (2s)-1-[(2s)-2-(3,4,5-trimethoxyphenyl)butanoyl]piperidine-2-carboxylate Chemical compound C([C@@H](OC(=O)[C@@H]1CCCCN1C(=O)[C@@H](CC)C=1C=C(OC)C(OC)=C(OC)C=1)C=1C=C(OCCN2CCOCC2)C=CC=1)CC1=CC=C(OC)C(OC)=C1 NMFHJNAPXOMSRX-PUPDPRJKSA-N 0.000 description 1
- 229910002091 carbon monoxide Inorganic materials 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 230000010365 information processing Effects 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 239000002120 nanofilm Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910000889 permalloy Inorganic materials 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
- H01F41/20—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates by evaporation
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Thin Magnetic Films (AREA)
- Compositions Of Macromolecular Compounds (AREA)
- Physical Vapour Deposition (AREA)
- Magnetic Record Carriers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12819183A JPS6018912A (ja) | 1983-07-13 | 1983-07-13 | 真空蒸着による薄膜形成方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12819183A JPS6018912A (ja) | 1983-07-13 | 1983-07-13 | 真空蒸着による薄膜形成方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6018912A true JPS6018912A (ja) | 1985-01-31 |
| JPH0330971B2 JPH0330971B2 (enrdf_load_stackoverflow) | 1991-05-01 |
Family
ID=14978698
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12819183A Granted JPS6018912A (ja) | 1983-07-13 | 1983-07-13 | 真空蒸着による薄膜形成方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6018912A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62158861A (ja) * | 1985-12-28 | 1987-07-14 | Ishikawajima Harima Heavy Ind Co Ltd | イオンプレ−テイング装置 |
-
1983
- 1983-07-13 JP JP12819183A patent/JPS6018912A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62158861A (ja) * | 1985-12-28 | 1987-07-14 | Ishikawajima Harima Heavy Ind Co Ltd | イオンプレ−テイング装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0330971B2 (enrdf_load_stackoverflow) | 1991-05-01 |
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