JPH0330971B2 - - Google Patents

Info

Publication number
JPH0330971B2
JPH0330971B2 JP12819183A JP12819183A JPH0330971B2 JP H0330971 B2 JPH0330971 B2 JP H0330971B2 JP 12819183 A JP12819183 A JP 12819183A JP 12819183 A JP12819183 A JP 12819183A JP H0330971 B2 JPH0330971 B2 JP H0330971B2
Authority
JP
Japan
Prior art keywords
vapor deposition
base material
evaporation
width
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12819183A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6018912A (ja
Inventor
Tetsuo Tatsuno
Setsu Arikawa
Hiroshi Takahashi
Kikuo Inoe
Fujio Hirochi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Taiyo Yuden Co Ltd
Original Assignee
Taiyo Yuden Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiyo Yuden Co Ltd filed Critical Taiyo Yuden Co Ltd
Priority to JP12819183A priority Critical patent/JPS6018912A/ja
Publication of JPS6018912A publication Critical patent/JPS6018912A/ja
Publication of JPH0330971B2 publication Critical patent/JPH0330971B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
    • H01F41/20—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates by evaporation

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Physical Vapour Deposition (AREA)
  • Magnetic Record Carriers (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Thin Magnetic Films (AREA)
JP12819183A 1983-07-13 1983-07-13 真空蒸着による薄膜形成方法 Granted JPS6018912A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12819183A JPS6018912A (ja) 1983-07-13 1983-07-13 真空蒸着による薄膜形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12819183A JPS6018912A (ja) 1983-07-13 1983-07-13 真空蒸着による薄膜形成方法

Publications (2)

Publication Number Publication Date
JPS6018912A JPS6018912A (ja) 1985-01-31
JPH0330971B2 true JPH0330971B2 (enrdf_load_stackoverflow) 1991-05-01

Family

ID=14978698

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12819183A Granted JPS6018912A (ja) 1983-07-13 1983-07-13 真空蒸着による薄膜形成方法

Country Status (1)

Country Link
JP (1) JPS6018912A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0762241B2 (ja) * 1985-12-28 1995-07-05 石川島播磨重工業株式会社 イオンプレ−テイング装置

Also Published As

Publication number Publication date
JPS6018912A (ja) 1985-01-31

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