JPS60177660A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS60177660A
JPS60177660A JP59032611A JP3261184A JPS60177660A JP S60177660 A JPS60177660 A JP S60177660A JP 59032611 A JP59032611 A JP 59032611A JP 3261184 A JP3261184 A JP 3261184A JP S60177660 A JPS60177660 A JP S60177660A
Authority
JP
Japan
Prior art keywords
dianhydride
temperature
resin
diamine
mol
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59032611A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0156529B2 (enExample
Inventor
Michio Kobayashi
道雄 小林
Akira Toko
都甲　明
Toshiro Takeda
敏郎 竹田
Shigenori Yamaoka
重徳 山岡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Bakelite Co Ltd
Original Assignee
Sumitomo Bakelite Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Bakelite Co Ltd filed Critical Sumitomo Bakelite Co Ltd
Priority to JP59032611A priority Critical patent/JPS60177660A/ja
Publication of JPS60177660A publication Critical patent/JPS60177660A/ja
Publication of JPH0156529B2 publication Critical patent/JPH0156529B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00—Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06—Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • C08G73/1039—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors comprising halogen-containing substituents
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00—Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06—Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • C08G73/1046—Polyimides containing oxygen in the form of ether bonds in the main chain
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00—Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06—Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • C08G73/1057—Polyimides containing other atoms than carbon, hydrogen, nitrogen or oxygen in the main chain
    • C08G73/106—Polyimides containing other atoms than carbon, hydrogen, nitrogen or oxygen in the main chain containing silicon
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00—Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06—Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • C08G73/1057—Polyimides containing other atoms than carbon, hydrogen, nitrogen or oxygen in the main chain
    • C08G73/1064—Polyimides containing other atoms than carbon, hydrogen, nitrogen or oxygen in the main chain containing sulfur
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00—Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06—Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • C08G73/1067—Wholly aromatic polyimides, i.e. having both tetracarboxylic and diamino moieties aromatically bound
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00—Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06—Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • C08G73/1067—Wholly aromatic polyimides, i.e. having both tetracarboxylic and diamino moieties aromatically bound
    • C08G73/1071—Wholly aromatic polyimides containing oxygen in the form of ether bonds in the main chain
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/29—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
    • H01L23/293—Organic, e.g. plastic
    • H01L23/296—Organo-silicon compounds
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Medicinal Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Physics & Mathematics (AREA)
  • Polymers With Sulfur, Phosphorus Or Metals In The Main Chain (AREA)
  • Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
JP59032611A 1984-02-24 1984-02-24 半導体装置の製造方法 Granted JPS60177660A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59032611A JPS60177660A (ja) 1984-02-24 1984-02-24 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59032611A JPS60177660A (ja) 1984-02-24 1984-02-24 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS60177660A true JPS60177660A (ja) 1985-09-11
JPH0156529B2 JPH0156529B2 (enExample) 1989-11-30

Family

ID=12363646

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59032611A Granted JPS60177660A (ja) 1984-02-24 1984-02-24 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS60177660A (enExample)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0243221A (ja) * 1988-06-10 1990-02-13 Occidental Chem Corp 新規可溶性ポリイミドシロキサン及びその製法及び用途
JPH02147630A (ja) * 1988-02-09 1990-06-06 Occidental Chem Corp 新規な可溶性ポリイミドシロキサン及びそれらの製造方法
JPH03195730A (ja) * 1989-12-25 1991-08-27 Hitachi Chem Co Ltd シロキサン変性ポリイミド及びその前駆体
JPH0441527A (ja) * 1990-06-08 1992-02-12 Sumitomo Bakelite Co Ltd 可溶性ポリイミドシロキサン
US5104966A (en) * 1989-06-13 1992-04-14 E. I. Du Pont De Nemours And Company Polyimide insulation with improved arc track resistance

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5242632A (en) * 1975-09-30 1977-04-02 Kumagai Gumi Co Ltd Structure of upset work tunnel
JPS57143327A (en) * 1981-02-27 1982-09-04 Nitto Electric Ind Co Ltd Production of siloxane-modified polyimide precursor
JPS57168943A (en) * 1981-04-13 1982-10-18 Hitachi Ltd Coating liquid for thin film formation
JPS587473A (ja) * 1981-07-07 1983-01-17 Hitachi Chem Co Ltd 接着剤組成物
JPS58180530A (ja) * 1982-04-19 1983-10-22 Hitachi Ltd 新規なフツ素含有ポリアミドおよびポリイミド

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5242632A (en) * 1975-09-30 1977-04-02 Kumagai Gumi Co Ltd Structure of upset work tunnel
JPS57143327A (en) * 1981-02-27 1982-09-04 Nitto Electric Ind Co Ltd Production of siloxane-modified polyimide precursor
JPS57168943A (en) * 1981-04-13 1982-10-18 Hitachi Ltd Coating liquid for thin film formation
JPS587473A (ja) * 1981-07-07 1983-01-17 Hitachi Chem Co Ltd 接着剤組成物
JPS58180530A (ja) * 1982-04-19 1983-10-22 Hitachi Ltd 新規なフツ素含有ポリアミドおよびポリイミド

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02147630A (ja) * 1988-02-09 1990-06-06 Occidental Chem Corp 新規な可溶性ポリイミドシロキサン及びそれらの製造方法
JPH0243221A (ja) * 1988-06-10 1990-02-13 Occidental Chem Corp 新規可溶性ポリイミドシロキサン及びその製法及び用途
US5104966A (en) * 1989-06-13 1992-04-14 E. I. Du Pont De Nemours And Company Polyimide insulation with improved arc track resistance
JPH03195730A (ja) * 1989-12-25 1991-08-27 Hitachi Chem Co Ltd シロキサン変性ポリイミド及びその前駆体
JPH0441527A (ja) * 1990-06-08 1992-02-12 Sumitomo Bakelite Co Ltd 可溶性ポリイミドシロキサン

Also Published As

Publication number Publication date
JPH0156529B2 (enExample) 1989-11-30

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term