JPS60159165A - 防湿性を有する透明薄膜の形成方法 - Google Patents

防湿性を有する透明薄膜の形成方法

Info

Publication number
JPS60159165A
JPS60159165A JP1666184A JP1666184A JPS60159165A JP S60159165 A JPS60159165 A JP S60159165A JP 1666184 A JP1666184 A JP 1666184A JP 1666184 A JP1666184 A JP 1666184A JP S60159165 A JPS60159165 A JP S60159165A
Authority
JP
Japan
Prior art keywords
thin film
film
moisture
transparent
transparent thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1666184A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0259867B2 (OSRAM
Inventor
Yoshiyuki Fukumoto
福本　義行
Kazu Yamanaka
山中　計
Shigemasa Kawai
河合　重征
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sekisui Chemical Co Ltd
Original Assignee
Sekisui Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sekisui Chemical Co Ltd filed Critical Sekisui Chemical Co Ltd
Priority to JP1666184A priority Critical patent/JPS60159165A/ja
Publication of JPS60159165A publication Critical patent/JPS60159165A/ja
Publication of JPH0259867B2 publication Critical patent/JPH0259867B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Laminated Bodies (AREA)
  • Physical Vapour Deposition (AREA)
JP1666184A 1984-01-30 1984-01-30 防湿性を有する透明薄膜の形成方法 Granted JPS60159165A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1666184A JPS60159165A (ja) 1984-01-30 1984-01-30 防湿性を有する透明薄膜の形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1666184A JPS60159165A (ja) 1984-01-30 1984-01-30 防湿性を有する透明薄膜の形成方法

Publications (2)

Publication Number Publication Date
JPS60159165A true JPS60159165A (ja) 1985-08-20
JPH0259867B2 JPH0259867B2 (OSRAM) 1990-12-13

Family

ID=11922516

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1666184A Granted JPS60159165A (ja) 1984-01-30 1984-01-30 防湿性を有する透明薄膜の形成方法

Country Status (1)

Country Link
JP (1) JPS60159165A (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109651847A (zh) * 2018-12-26 2019-04-19 沈阳三三新材料有限公司 一种防潮氧化镁粉的制备方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109651847A (zh) * 2018-12-26 2019-04-19 沈阳三三新材料有限公司 一种防潮氧化镁粉的制备方法

Also Published As

Publication number Publication date
JPH0259867B2 (OSRAM) 1990-12-13

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term