JPS60134277A - Ｅｌパネルの製造方法 - Google Patents
Ｅｌパネルの製造方法Info
- Publication number
- JPS60134277A JPS60134277A JP58242956A JP24295683A JPS60134277A JP S60134277 A JPS60134277 A JP S60134277A JP 58242956 A JP58242956 A JP 58242956A JP 24295683 A JP24295683 A JP 24295683A JP S60134277 A JPS60134277 A JP S60134277A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- film
- insulating layer
- panel
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 13
- 239000010408 film Substances 0.000 claims description 57
- 239000007789 gas Substances 0.000 claims description 47
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 16
- 229910052760 oxygen Inorganic materials 0.000 claims description 16
- 239000001301 oxygen Substances 0.000 claims description 16
- 230000002950 deficient Effects 0.000 claims description 15
- 239000010409 thin film Substances 0.000 claims description 14
- 150000001875 compounds Chemical class 0.000 claims description 13
- 239000000758 substrate Substances 0.000 claims description 12
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 5
- 238000005546 reactive sputtering Methods 0.000 claims description 5
- 239000000203 mixture Substances 0.000 claims description 3
- 229910007277 Si3 N4 Inorganic materials 0.000 claims 1
- 239000010802 sludge Substances 0.000 claims 1
- 239000011159 matrix material Substances 0.000 description 4
- 238000007796 conventional method Methods 0.000 description 3
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 238000005566 electron beam evaporation Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 241000254032 Acrididae Species 0.000 description 1
- 229910005091 Si3N Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000011328 necessary treatment Methods 0.000 description 1
Landscapes
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58242956A JPS60134277A (ja) | 1983-12-22 | 1983-12-22 | Ｅｌパネルの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58242956A JPS60134277A (ja) | 1983-12-22 | 1983-12-22 | Ｅｌパネルの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60134277A true JPS60134277A (ja) | 1985-07-17 |
| JPH0129320B2 JPH0129320B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-06-09 |
Family
ID=17096723
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58242956A Granted JPS60134277A (ja) | 1983-12-22 | 1983-12-22 | Ｅｌパネルの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60134277A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS622495A (ja) * | 1985-06-26 | 1987-01-08 | ホ−ヤ株式会社 | 薄膜ｅｌ素子の製造方法 |
| WO1988000382A1 (fr) * | 1986-07-03 | 1988-01-14 | Kabushiki Kaisha Komatsu Seisakusho | Dispositif d'affichage en couleurs |
| JPS6345797A (ja) * | 1986-08-13 | 1988-02-26 | 株式会社日立製作所 | 薄膜発光素子 |
| JPH01107495A (ja) * | 1987-10-19 | 1989-04-25 | Sharp Corp | 薄膜エレクトロルミネッセンス素子 |
| JPH01177898U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1988-06-03 | 1989-12-19 |
-
1983
- 1983-12-22 JP JP58242956A patent/JPS60134277A/ja active Granted
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS622495A (ja) * | 1985-06-26 | 1987-01-08 | ホ−ヤ株式会社 | 薄膜ｅｌ素子の製造方法 |
| WO1988000382A1 (fr) * | 1986-07-03 | 1988-01-14 | Kabushiki Kaisha Komatsu Seisakusho | Dispositif d'affichage en couleurs |
| JPS6345797A (ja) * | 1986-08-13 | 1988-02-26 | 株式会社日立製作所 | 薄膜発光素子 |
| JPH01107495A (ja) * | 1987-10-19 | 1989-04-25 | Sharp Corp | 薄膜エレクトロルミネッセンス素子 |
| JPH01177898U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1988-06-03 | 1989-12-19 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0129320B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-06-09 |