JPH0129320B2 - - Google Patents
Info
- Publication number
- JPH0129320B2 JPH0129320B2 JP58242956A JP24295683A JPH0129320B2 JP H0129320 B2 JPH0129320 B2 JP H0129320B2 JP 58242956 A JP58242956 A JP 58242956A JP 24295683 A JP24295683 A JP 24295683A JP H0129320 B2 JPH0129320 B2 JP H0129320B2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- film
- sio
- forming
- insulating layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010408 film Substances 0.000 claims description 70
- 239000007789 gas Substances 0.000 claims description 58
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 29
- 229910052760 oxygen Inorganic materials 0.000 claims description 16
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 15
- 150000001875 compounds Chemical class 0.000 claims description 15
- 230000002950 deficient Effects 0.000 claims description 15
- 239000001301 oxygen Substances 0.000 claims description 15
- 239000010409 thin film Substances 0.000 claims description 15
- 238000004519 manufacturing process Methods 0.000 claims description 13
- 239000000758 substrate Substances 0.000 claims description 13
- 238000000034 method Methods 0.000 claims description 10
- 238000005546 reactive sputtering Methods 0.000 claims description 5
- 239000011159 matrix material Substances 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- 229910006404 SnO 2 Inorganic materials 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000005566 electron beam evaporation Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
Landscapes
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58242956A JPS60134277A (ja) | 1983-12-22 | 1983-12-22 | Ｅｌパネルの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58242956A JPS60134277A (ja) | 1983-12-22 | 1983-12-22 | Ｅｌパネルの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60134277A JPS60134277A (ja) | 1985-07-17 |
| JPH0129320B2 true JPH0129320B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-06-09 |
Family
ID=17096723
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58242956A Granted JPS60134277A (ja) | 1983-12-22 | 1983-12-22 | Ｅｌパネルの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60134277A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS622495A (ja) * | 1985-06-26 | 1987-01-08 | ホ−ヤ株式会社 | 薄膜ｅｌ素子の製造方法 |
| JP2531686B2 (ja) * | 1986-07-03 | 1996-09-04 | 株式会社小松製作所 | カラ−表示装置 |
| JPH0740515B2 (ja) * | 1986-08-13 | 1995-05-01 | 株式会社日立製作所 | 薄膜発光素子 |
| JPH07118391B2 (ja) * | 1987-10-19 | 1995-12-18 | シャープ株式会社 | 薄膜エレクトロルミネッセンス素子 |
| JPH01177898U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1988-06-03 | 1989-12-19 |
-
1983
- 1983-12-22 JP JP58242956A patent/JPS60134277A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60134277A (ja) | 1985-07-17 |