JPS60132676A - 回転する基板上に一様な厚さの膜を形成させる塗布装置 - Google Patents

回転する基板上に一様な厚さの膜を形成させる塗布装置

Info

Publication number
JPS60132676A
JPS60132676A JP58240698A JP24069883A JPS60132676A JP S60132676 A JPS60132676 A JP S60132676A JP 58240698 A JP58240698 A JP 58240698A JP 24069883 A JP24069883 A JP 24069883A JP S60132676 A JPS60132676 A JP S60132676A
Authority
JP
Japan
Prior art keywords
substrate
lid member
lid
space
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58240698A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6231991B2 (cg-RX-API-DMAC7.html
Inventor
Takashi Tsurukubo
鶴窪　隆
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Victor Company of Japan Ltd
Nippon Victor KK
Original Assignee
Victor Company of Japan Ltd
Nippon Victor KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Victor Company of Japan Ltd, Nippon Victor KK filed Critical Victor Company of Japan Ltd
Priority to JP58240698A priority Critical patent/JPS60132676A/ja
Publication of JPS60132676A publication Critical patent/JPS60132676A/ja
Publication of JPS6231991B2 publication Critical patent/JPS6231991B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP58240698A 1983-12-20 1983-12-20 回転する基板上に一様な厚さの膜を形成させる塗布装置 Granted JPS60132676A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58240698A JPS60132676A (ja) 1983-12-20 1983-12-20 回転する基板上に一様な厚さの膜を形成させる塗布装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58240698A JPS60132676A (ja) 1983-12-20 1983-12-20 回転する基板上に一様な厚さの膜を形成させる塗布装置

Publications (2)

Publication Number Publication Date
JPS60132676A true JPS60132676A (ja) 1985-07-15
JPS6231991B2 JPS6231991B2 (cg-RX-API-DMAC7.html) 1987-07-11

Family

ID=17063366

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58240698A Granted JPS60132676A (ja) 1983-12-20 1983-12-20 回転する基板上に一様な厚さの膜を形成させる塗布装置

Country Status (1)

Country Link
JP (1) JPS60132676A (cg-RX-API-DMAC7.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS64737A (en) * 1987-03-27 1989-01-05 Toshiba Corp Applicator for resist

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63305984A (ja) * 1987-06-08 1988-12-13 Matsushita Electric Ind Co Ltd 再生装置付硬水軟水器
JPS63305985A (ja) * 1987-06-08 1988-12-13 Matsushita Electric Ind Co Ltd 再生装置付硬水軟水器

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS64737A (en) * 1987-03-27 1989-01-05 Toshiba Corp Applicator for resist

Also Published As

Publication number Publication date
JPS6231991B2 (cg-RX-API-DMAC7.html) 1987-07-11

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