JPS60124852U - 電子線装置 - Google Patents

電子線装置

Info

Publication number
JPS60124852U
JPS60124852U JP1257584U JP1257584U JPS60124852U JP S60124852 U JPS60124852 U JP S60124852U JP 1257584 U JP1257584 U JP 1257584U JP 1257584 U JP1257584 U JP 1257584U JP S60124852 U JPS60124852 U JP S60124852U
Authority
JP
Japan
Prior art keywords
electron beam
sample
scanning
beam equipment
converging
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1257584U
Other languages
English (en)
Japanese (ja)
Other versions
JPH024441Y2 (enrdf_load_stackoverflow
Inventor
生江　隆男
宏 島田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP1257584U priority Critical patent/JPS60124852U/ja
Publication of JPS60124852U publication Critical patent/JPS60124852U/ja
Application granted granted Critical
Publication of JPH024441Y2 publication Critical patent/JPH024441Y2/ja
Granted legal-status Critical Current

Links

JP1257584U 1984-02-01 1984-02-01 電子線装置 Granted JPS60124852U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1257584U JPS60124852U (ja) 1984-02-01 1984-02-01 電子線装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1257584U JPS60124852U (ja) 1984-02-01 1984-02-01 電子線装置

Publications (2)

Publication Number Publication Date
JPS60124852U true JPS60124852U (ja) 1985-08-22
JPH024441Y2 JPH024441Y2 (enrdf_load_stackoverflow) 1990-02-01

Family

ID=30495768

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1257584U Granted JPS60124852U (ja) 1984-02-01 1984-02-01 電子線装置

Country Status (1)

Country Link
JP (1) JPS60124852U (enrdf_load_stackoverflow)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62184752A (ja) * 1986-02-07 1987-08-13 Jeol Ltd 荷電粒子ビ−ム測長機
JPS62234859A (ja) * 1986-03-24 1987-10-15 ザ　ウエルデイング　インステイテユ−ト 電子収集アッセンブリ
JPH01143127A (ja) * 1987-11-27 1989-06-05 Hitachi Ltd 走査電子顕微鏡による表面形状測定方法
JPH0266842A (ja) * 1988-08-31 1990-03-06 Jeol Ltd 荷電粒子検出器用電源装置
JP2002141015A (ja) * 2000-10-13 2002-05-17 Applied Materials Inc 基体検査装置及び方法
JP2014150002A (ja) * 2013-02-01 2014-08-21 Horon:Kk ノイズ低減電子ビーム装置および電子ビームノイズ低減方法

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62184752A (ja) * 1986-02-07 1987-08-13 Jeol Ltd 荷電粒子ビ−ム測長機
JPS62234859A (ja) * 1986-03-24 1987-10-15 ザ　ウエルデイング　インステイテユ−ト 電子収集アッセンブリ
JPH01143127A (ja) * 1987-11-27 1989-06-05 Hitachi Ltd 走査電子顕微鏡による表面形状測定方法
JPH0266842A (ja) * 1988-08-31 1990-03-06 Jeol Ltd 荷電粒子検出器用電源装置
JP2002141015A (ja) * 2000-10-13 2002-05-17 Applied Materials Inc 基体検査装置及び方法
JP2014150002A (ja) * 2013-02-01 2014-08-21 Horon:Kk ノイズ低減電子ビーム装置および電子ビームノイズ低減方法

Also Published As

Publication number Publication date
JPH024441Y2 (enrdf_load_stackoverflow) 1990-02-01

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