JPS5920471A - 剥離剤 - Google Patents

剥離剤

Info

Publication number
JPS5920471A
JPS5920471A JP12757182A JP12757182A JPS5920471A JP S5920471 A JPS5920471 A JP S5920471A JP 12757182 A JP12757182 A JP 12757182A JP 12757182 A JP12757182 A JP 12757182A JP S5920471 A JPS5920471 A JP S5920471A
Authority
JP
Japan
Prior art keywords
layer
stripping
stripping agent
agent
plating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12757182A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0242904B2 (esLanguage
Inventor
Takayuki Sone
孝之 曽根
Mitsuru Shibata
満 柴田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EEJA Ltd
Original Assignee
Electroplating Engineers of Japan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Electroplating Engineers of Japan Ltd filed Critical Electroplating Engineers of Japan Ltd
Priority to JP12757182A priority Critical patent/JPS5920471A/ja
Publication of JPS5920471A publication Critical patent/JPS5920471A/ja
Publication of JPH0242904B2 publication Critical patent/JPH0242904B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/10—Etching compositions
    • C23F1/14—Aqueous compositions
    • C23F1/32—Alkaline compositions
    • C23F1/34—Alkaline compositions for etching copper or alloys thereof
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/44—Compositions for etching metallic material from a metallic material substrate of different composition

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • ing And Chemical Polishing (AREA)
JP12757182A 1982-07-23 1982-07-23 剥離剤 Granted JPS5920471A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12757182A JPS5920471A (ja) 1982-07-23 1982-07-23 剥離剤

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12757182A JPS5920471A (ja) 1982-07-23 1982-07-23 剥離剤

Publications (2)

Publication Number Publication Date
JPS5920471A true JPS5920471A (ja) 1984-02-02
JPH0242904B2 JPH0242904B2 (esLanguage) 1990-09-26

Family

ID=14963331

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12757182A Granted JPS5920471A (ja) 1982-07-23 1982-07-23 剥離剤

Country Status (1)

Country Link
JP (1) JPS5920471A (esLanguage)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05214565A (ja) * 1991-10-18 1993-08-24 Internatl Business Mach Corp <Ibm> より高反応性材料の存在下でより低反応性材料をエッチングする方法
JP2012062572A (ja) * 2010-08-16 2012-03-29 Advanced Technology Materials Inc 銅または銅合金用エッチング液
JP2012072490A (ja) * 2010-08-30 2012-04-12 Dowa Eco-System Co Ltd 金の回収方法
CN103397351A (zh) * 2013-07-24 2013-11-20 励福实业（江门）贵金属有限公司 自动脱金生产装置、方法及使用的脱金水

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0444503A (ja) * 1990-06-11 1992-02-14 Nippon Doro Kodan 鋼製伸縮継手

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05214565A (ja) * 1991-10-18 1993-08-24 Internatl Business Mach Corp <Ibm> より高反応性材料の存在下でより低反応性材料をエッチングする方法
JP2012062572A (ja) * 2010-08-16 2012-03-29 Advanced Technology Materials Inc 銅または銅合金用エッチング液
US10570522B2 (en) 2010-08-16 2020-02-25 Entegris, Inc. Etching solution for copper or copper alloy
JP2012072490A (ja) * 2010-08-30 2012-04-12 Dowa Eco-System Co Ltd 金の回収方法
CN103397351A (zh) * 2013-07-24 2013-11-20 励福实业（江门）贵金属有限公司 自动脱金生产装置、方法及使用的脱金水

Also Published As

Publication number Publication date
JPH0242904B2 (esLanguage) 1990-09-26

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