JPS59185834U - 試験システム用接続装置 - Google Patents

試験システム用接続装置

Info

Publication number
JPS59185834U
JPS59185834U JP1984061563U JP6156384U JPS59185834U JP S59185834 U JPS59185834 U JP S59185834U JP 1984061563 U JP1984061563 U JP 1984061563U JP 6156384 U JP6156384 U JP 6156384U JP S59185834 U JPS59185834 U JP S59185834U
Authority
JP
Japan
Prior art keywords
conductive
conductive region
circuit board
connection device
semiconductor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1984061563U
Other languages
English (en)
Other versions
JPS6138191Y2 (ja
Inventor
ロバ−ト・エム・モ−トン
アリル・エル・パ−ルマン
Original Assignee
インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション filed Critical インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション
Publication of JPS59185834U publication Critical patent/JPS59185834U/ja
Application granted granted Critical
Publication of JPS6138191Y2 publication Critical patent/JPS6138191Y2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
    • G01R1/07378—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using an intermediate adapter, e.g. space transformers

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。

Description

【図面の簡単な説明】
第１図は、本考案の良好な実施例によるプログラム可能
界面接触装置の一部断面の斜視図、第２図は、本考案の
良好な実施例によるプログラム可能界面接触装置の第１
図の線２−２に沿って得られた断面図、第３薗は、第１
図及び第２図のプログラム可能界面接触構造体の空間変
換器構造体２の上段プレート６の部分の断面図で、第３
図に示された該上段プレート６は代表的なポゴ導電体１
３．１４を含み、且つ、該ポゴ導電体がどの様な状態で
上記上段プレート６内に備え付けられるかを示し、第４
図は１、第１図及び第２図のプログラム可能界面接触装
置の部品番号印刷回路の一部分の断面図を示し、更に柱
環２１を有したピンをも示す図、第５図は、第１図及び
第２図のプログラム可能界面接触装置の空間変換器構造
体２の一部分の断面図、第６図は、第１図及び第２図の
プログラム可能界面接触装置の空間変換器構造体２の電
力供給印刷回路板９の平面図、第７図は、第６図の電力
供給印刷回路板の一部分の断面図であ６°１　＝ｉ！。 ｍｉｔｔａｍｉ、２００．ゆ□−一。 体、９・・・電力供給印刷回路板、１１．１２・・・導
電線、３１・・・探査針、４２・・・芒験される装置。

Claims (2)

    【実用新案登録請求の範囲】
  1. （１）複数個の導電性パッドを有する半導体装置を試験
    するための試験システムに用いる接続装置であって、−
    表面に複数個の電気的コネクタを有し他表面に該コネク
    タに接続する導電性領域を有する回路板と、−表面に上
    記導電性領域に接触する導電性領域を有するスペース変
    換器と、上記スペース変換器の導電性領域のそれぞれを
    試験すべき半導体装置の導電性パッドに電気的に接続す
    るための複数個の探査針とを有し、上′記試験すべき半
    導体装置に応じた素子を上記回路板の電気コネクタに接
    続して該半導体装置の試験を行なうようにしたことを特
    徴とする上記接続装置。
  2. （２）上記スペース変換器は、−表面に上記回路板の導
    電性領域に接触する導電性領域を有し他表面に該導電性
    領域に接続する電気接点を有する第１の平坦部材及び該
    第１の平坦部材に平行に設けられた第２の平行部材を有
    し、該第２の平坦部材は上記電気接点に接続する該電気
    接点よりも狭い間隔で設けられた導電性領域を有する登
    録請求の範囲第（１）項の接続装置。
JP1984061563U 1975-02-10 1984-04-27 試験システム用接続装置 Granted JPS59185834U (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US05/548,659 US3963986A (en) 1975-02-10 1975-02-10 Programmable interface contactor structure
US548659 1975-02-10

Publications (2)

Publication Number Publication Date
JPS59185834U true JPS59185834U (ja) 1984-12-10
JPS6138191Y2 JPS6138191Y2 (ja) 1986-11-05

Family

ID=24189825

Family Applications (2)

Application Number Title Priority Date Filing Date
JP51006744A Pending JPS51100680A (ja) 1975-02-10 1976-01-26
JP1984061563U Granted JPS59185834U (ja) 1975-02-10 1984-04-27 試験システム用接続装置

Family Applications Before (1)

Application Number Title Priority Date Filing Date
JP51006744A Pending JPS51100680A (ja) 1975-02-10 1976-01-26

Country Status (5)

Country Link
US (1) US3963986A (ja)
JP (2) JPS51100680A (ja)
DE (1) DE2604837A1 (ja)
FR (1) FR2300486A1 (ja)
GB (1) GB1514060A (ja)

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DE3038665C2 (de) * 1980-10-13 1990-03-29 Riba-Prüftechnik GmbH, 7801 Schallstadt Prüfeinrichtung zum Überprüfen von mit Leiterbahnen versehenen Leiterplatten
US4500836A (en) * 1980-10-31 1985-02-19 Pacific Western Systems, Inc. Automatic wafer prober with programmable tester interface
US4443756A (en) * 1980-11-25 1984-04-17 Lightbody James D Apparatus and method for testing circuit boards
US4488111A (en) * 1982-06-01 1984-12-11 At&T Technologies, Inc. Coupling devices for operations such as testing
US4585991A (en) * 1982-06-03 1986-04-29 Texas Instruments Incorporated Solid state multiprobe testing apparatus
JPS59143340A (ja) * 1983-02-05 1984-08-16 Rohm Co Ltd プロ−ブカ−ド
US4567432A (en) * 1983-06-09 1986-01-28 Texas Instruments Incorporated Apparatus for testing integrated circuits
US4574236A (en) * 1983-10-27 1986-03-04 At&T Technologies, Inc. High frequency test fixture
DE3340179C1 (de) * 1983-11-07 1985-05-09 MANIA Elektronik Automatisation Entwicklung und Gerätebau GmbH Anordnung an einem Leiterplattenpruefgeraet zur Anpassung der Abstaende von Kontakten
DK291184D0 (da) * 1984-06-13 1984-06-13 Boeegh Petersen Allan Fremgangsmaade og indretning til test af kredsloebsplader
JPS6113932U (ja) * 1984-06-28 1986-01-27 富士通株式会社 半導体集積回路試験装置
US4694245A (en) * 1984-09-07 1987-09-15 Precision Drilling, Inc. Vacuum-actuated top access test probe fixture
US4734046A (en) * 1984-09-21 1988-03-29 International Business Machines Corporation Coaxial converter with resilient terminal
US4672312A (en) * 1984-12-20 1987-06-09 Hughes Aircraft Company Giga-hertz test jig
US4712062A (en) * 1984-12-20 1987-12-08 Hughes Aircraft Company Ground shield apparatus for giga-hertz test jig
US4825155A (en) * 1984-12-20 1989-04-25 Hughes Aircraft Company X-band logic test jig
US4771236A (en) * 1985-12-16 1988-09-13 Banks Sherman M Multilayered printed circuit board type resistor isolated tray for stress testing integrated circuits and method of making same
US4827211A (en) * 1987-01-30 1989-05-02 Cascade Microtech, Inc. Wafer probe
DE3882563D1 (de) * 1987-03-31 1993-09-02 Siemens Ag Vorrichtung fuer die elektrische funktionspruefung von verdrahtungsfeldern, insbesondere von leiterplatten.
JPS63274154A (ja) * 1987-04-29 1988-11-11 インターナシヨナル・ビジネス・マシーンズ・コーポレーシヨン プローブ・カード装置
US4862077A (en) * 1987-04-29 1989-08-29 International Business Machines Corporation Probe card apparatus and method of providing same with reconfigurable probe card circuitry
US4983907A (en) * 1987-05-14 1991-01-08 Intel Corporation Driven guard probe card
JPH0429561Y2 (ja) * 1987-08-18 1992-07-17
US4935694A (en) * 1988-09-20 1990-06-19 Electro Scientific Industries, Inc. Probe card fixture
US5014002A (en) * 1989-04-18 1991-05-07 Vlsi Technology, Inc. ATE jumper programmable interface board
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US5132612A (en) * 1991-03-14 1992-07-21 The United States Of America As Represented By The Secretary Of The Air Force Apparatus for electrostatic discharge (ESD) stress/testing
US5144228A (en) * 1991-04-23 1992-09-01 International Business Machines Corporation Probe interface assembly
US5304921A (en) * 1991-08-07 1994-04-19 Hewlett-Packard Company Enhanced grounding system for short-wire lengthed fixture
US5371654A (en) * 1992-10-19 1994-12-06 International Business Machines Corporation Three dimensional high performance interconnection package
US20050062492A1 (en) * 2001-08-03 2005-03-24 Beaman Brian Samuel High density integrated circuit apparatus, test probe and methods of use thereof
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS48104261U (ja) * 1972-03-09 1973-12-05
JPS4991582A (ja) * 1972-12-26 1974-09-02

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Patent Citations (2)

* Cited by examiner, † Cited by third party
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JPS48104261U (ja) * 1972-03-09 1973-12-05
JPS4991582A (ja) * 1972-12-26 1974-09-02

Also Published As

Publication number Publication date
DE2604837A1 (de) 1976-08-19
JPS6138191Y2 (ja) 1986-11-05
US3963986A (en) 1976-06-15
GB1514060A (en) 1978-06-14
FR2300486B1 (ja) 1978-11-10
JPS51100680A (ja) 1976-09-06
FR2300486A1 (fr) 1976-09-03

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