JPS5916346A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS5916346A
JPS5916346A JP57126418A JP12641882A JPS5916346A JP S5916346 A JPS5916346 A JP S5916346A JP 57126418 A JP57126418 A JP 57126418A JP 12641882 A JP12641882 A JP 12641882A JP S5916346 A JPS5916346 A JP S5916346A
Authority
JP
Japan
Prior art keywords
film
psg film
flow
psg
drain
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57126418A
Other languages
English (en)
Japanese (ja)
Other versions
JPS643343B2 (enExample
Inventor
Masakatsu Yoshida
吉田　正勝
Toshiyuki Yokoyama
敏之 横山
Takamichi Takebayashi
竹林　孝路
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp, Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electronics Corp
Priority to JP57126418A priority Critical patent/JPS5916346A/ja
Publication of JPS5916346A publication Critical patent/JPS5916346A/ja
Publication of JPS643343B2 publication Critical patent/JPS643343B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP57126418A 1982-07-19 1982-07-19 半導体装置の製造方法 Granted JPS5916346A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57126418A JPS5916346A (ja) 1982-07-19 1982-07-19 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57126418A JPS5916346A (ja) 1982-07-19 1982-07-19 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS5916346A true JPS5916346A (ja) 1984-01-27
JPS643343B2 JPS643343B2 (enExample) 1989-01-20

Family

ID=14934676

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57126418A Granted JPS5916346A (ja) 1982-07-19 1982-07-19 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS5916346A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6037132A (ja) * 1983-08-09 1985-02-26 Ushio Inc 燐硅酸ガラスもしくは燐硼素硅酸ガラスの流動化法
JPS61263159A (ja) * 1985-03-15 1986-11-21 フエアチヤイルド　セミコンダクタ　コ−ポレ−シヨン 集積回路用の高温相互接続方式
EP0794563A3 (en) * 1996-03-06 1997-09-17 Nec Corporation Semiconductor device having oxygen-doped silicon layer so as to restrict diffusion from heavily doped silicon layer and process of fabrication thereof

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5460558A (en) * 1977-10-24 1979-05-16 Hitachi Ltd Electrode forming method
JPS5591872A (en) * 1978-12-29 1980-07-11 Nec Corp Manufacture of semiconductor device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5460558A (en) * 1977-10-24 1979-05-16 Hitachi Ltd Electrode forming method
JPS5591872A (en) * 1978-12-29 1980-07-11 Nec Corp Manufacture of semiconductor device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6037132A (ja) * 1983-08-09 1985-02-26 Ushio Inc 燐硅酸ガラスもしくは燐硼素硅酸ガラスの流動化法
JPS61263159A (ja) * 1985-03-15 1986-11-21 フエアチヤイルド　セミコンダクタ　コ−ポレ−シヨン 集積回路用の高温相互接続方式
EP0794563A3 (en) * 1996-03-06 1997-09-17 Nec Corporation Semiconductor device having oxygen-doped silicon layer so as to restrict diffusion from heavily doped silicon layer and process of fabrication thereof

Also Published As

Publication number Publication date
JPS643343B2 (enExample) 1989-01-20

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