JPS59158512A - 高誘電体薄膜コンデンサ - Google Patents
高誘電体薄膜コンデンサInfo
- Publication number
- JPS59158512A JPS59158512A JP3185683A JP3185683A JPS59158512A JP S59158512 A JPS59158512 A JP S59158512A JP 3185683 A JP3185683 A JP 3185683A JP 3185683 A JP3185683 A JP 3185683A JP S59158512 A JPS59158512 A JP S59158512A
- Authority
- JP
- Japan
- Prior art keywords
- high dielectric
- thin film
- dielectric thin
- thickness
- capacitor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title claims description 16
- 239000003990 capacitor Substances 0.000 claims description 24
- 239000011888 foil Substances 0.000 claims description 20
- 229910052751 metal Inorganic materials 0.000 claims description 17
- 239000002184 metal Substances 0.000 claims description 17
- 238000000034 method Methods 0.000 description 13
- 239000003989 dielectric material Substances 0.000 description 8
- 239000000463 material Substances 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 229910002113 barium titanate Inorganic materials 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 238000010030 laminating Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 239000010408 film Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000003973 paint Substances 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- 229920001342 Bakelite® Polymers 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003985 ceramic capacitor Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 230000008014 freezing Effects 0.000 description 1
- 238000007710 freezing Methods 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 229910052573 porcelain Inorganic materials 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 230000037303 wrinkles Effects 0.000 description 1
Landscapes
- Ceramic Capacitors (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3185683A JPS59158512A (ja) | 1983-03-01 | 1983-03-01 | 高誘電体薄膜コンデンサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3185683A JPS59158512A (ja) | 1983-03-01 | 1983-03-01 | 高誘電体薄膜コンデンサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59158512A true JPS59158512A (ja) | 1984-09-08 |
| JPH025006B2 JPH025006B2 (https=) | 1990-01-31 |
Family
ID=12342686
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3185683A Granted JPS59158512A (ja) | 1983-03-01 | 1983-03-01 | 高誘電体薄膜コンデンサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59158512A (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007266459A (ja) * | 2006-03-29 | 2007-10-11 | Tdk Corp | コンデンサの製造方法 |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5231367A (en) * | 1975-09-03 | 1977-03-09 | Matsushita Electric Industrial Co Ltd | Method of manufacturing thin film capacitor |
| JPS5262648A (en) * | 1975-11-20 | 1977-05-24 | Matsushita Electric Industrial Co Ltd | Method of manufacturing titanium capacitor |
| JPS55127011A (en) * | 1979-03-26 | 1980-10-01 | Tdk Electronics Co Ltd | Capacitor and method of manufacturing same |
| JPS5683923A (en) * | 1979-12-13 | 1981-07-08 | Showa Aluminium Co Ltd | Electrode foil for electrolytic condenser and method of manufacting same |
| JPS5745968A (en) * | 1980-08-29 | 1982-03-16 | Ibm | Capacitor with double dielectric unit |
-
1983
- 1983-03-01 JP JP3185683A patent/JPS59158512A/ja active Granted
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5231367A (en) * | 1975-09-03 | 1977-03-09 | Matsushita Electric Industrial Co Ltd | Method of manufacturing thin film capacitor |
| JPS5262648A (en) * | 1975-11-20 | 1977-05-24 | Matsushita Electric Industrial Co Ltd | Method of manufacturing titanium capacitor |
| JPS55127011A (en) * | 1979-03-26 | 1980-10-01 | Tdk Electronics Co Ltd | Capacitor and method of manufacturing same |
| JPS5683923A (en) * | 1979-12-13 | 1981-07-08 | Showa Aluminium Co Ltd | Electrode foil for electrolytic condenser and method of manufacting same |
| JPS5745968A (en) * | 1980-08-29 | 1982-03-16 | Ibm | Capacitor with double dielectric unit |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007266459A (ja) * | 2006-03-29 | 2007-10-11 | Tdk Corp | コンデンサの製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH025006B2 (https=) | 1990-01-31 |
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