JPS59144048A - 磁気記録媒体の製造方法 - Google Patents

Info

Publication number

JPS59144048A

JPS59144048A JP1868883A JP1868883A JPS59144048A JP S59144048 A JPS59144048 A JP S59144048A JP 1868883 A JP1868883 A JP 1868883A JP 1868883 A JP1868883 A JP 1868883A JP S59144048 A JPS59144048 A JP S59144048A

Authority

JP

Japan

Prior art keywords

substrate

base material

angle

vapor

vapor deposition

Prior art date

1983-02-07

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

Links

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• 238000004519 manufacturing process Methods 0.000 title claims description 9
• 239000000463 material Substances 0.000 claims abstract description 34
• 238000007740 vapor deposition Methods 0.000 claims abstract description 17
• QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 15
• 239000001301 oxygen Substances 0.000 claims abstract description 15
• 229910052760 oxygen Inorganic materials 0.000 claims abstract description 15
• 239000000758 substrate Substances 0.000 claims description 27
• MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims description 18
• 229910001882 dioxygen Inorganic materials 0.000 claims description 18
• 239000000126 substance Substances 0.000 claims description 17
• 238000000151 deposition Methods 0.000 claims description 15
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• 230000005294 ferromagnetic effect Effects 0.000 claims description 5
• 238000005507 spraying Methods 0.000 claims description 2
• 229910045601 alloy Inorganic materials 0.000 abstract description 6
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• 230000008021 deposition Effects 0.000 description 9
• 238000001704 evaporation Methods 0.000 description 8
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• 239000002245 particle Substances 0.000 description 5
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• 238000007796 conventional method Methods 0.000 description 2
• 239000013078 crystal Substances 0.000 description 2
• 238000010894 electron beam technology Methods 0.000 description 2
• 239000007789 gas Substances 0.000 description 2
• 229920000139 polyethylene terephthalate Polymers 0.000 description 2
• 239000005020 polyethylene terephthalate Substances 0.000 description 2
• QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 1
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• NNLVGZFZQQXQNW-ADJNRHBOSA-N [(2r,3r,4s,5r,6s)-4,5-diacetyloxy-3-[(2s,3r,4s,5r,6r)-3,4,5-triacetyloxy-6-(acetyloxymethyl)oxan-2-yl]oxy-6-[(2r,3r,4s,5r,6s)-4,5,6-triacetyloxy-2-(acetyloxymethyl)oxan-3-yl]oxyoxan-2-yl]methyl acetate Chemical compound O([C@@H]1O[C@@H]([C@H]([C@H](OC(C)=O)[C@H]1OC(C)=O)O[C@H]1[C@@H]([C@@H](OC(C)=O)[C@H](OC(C)=O)[C@@H](COC(C)=O)O1)OC(C)=O)COC(=O)C)[C@@H]1[C@@H](COC(C)=O)O[C@@H](OC(C)=O)[C@H](OC(C)=O)[C@H]1OC(C)=O NNLVGZFZQQXQNW-ADJNRHBOSA-N 0.000 description 1
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• 229920000515 polycarbonate Polymers 0.000 description 1
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