JPS59100572A - 薄膜トランジスタ - Google Patents

薄膜トランジスタ

Info

Publication number
JPS59100572A
JPS59100572A JP57211568A JP21156882A JPS59100572A JP S59100572 A JPS59100572 A JP S59100572A JP 57211568 A JP57211568 A JP 57211568A JP 21156882 A JP21156882 A JP 21156882A JP S59100572 A JPS59100572 A JP S59100572A
Authority
JP
Japan
Prior art keywords
insulating film
film
gate insulating
thin film
gate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57211568A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0377670B2 (enrdf_load_stackoverflow
Inventor
Yutaka Takato
裕 高藤
Kohei Kishi
岸　幸平
Fumiaki Funada
船田　文明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP57211568A priority Critical patent/JPS59100572A/ja
Publication of JPS59100572A publication Critical patent/JPS59100572A/ja
Publication of JPH0377670B2 publication Critical patent/JPH0377670B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]

Landscapes

  • Liquid Crystal (AREA)
  • Formation Of Insulating Films (AREA)
JP57211568A 1982-11-30 1982-11-30 薄膜トランジスタ Granted JPS59100572A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57211568A JPS59100572A (ja) 1982-11-30 1982-11-30 薄膜トランジスタ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57211568A JPS59100572A (ja) 1982-11-30 1982-11-30 薄膜トランジスタ

Publications (2)

Publication Number Publication Date
JPS59100572A true JPS59100572A (ja) 1984-06-09
JPH0377670B2 JPH0377670B2 (enrdf_load_stackoverflow) 1991-12-11

Family

ID=16607934

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57211568A Granted JPS59100572A (ja) 1982-11-30 1982-11-30 薄膜トランジスタ

Country Status (1)

Country Link
JP (1) JPS59100572A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63126277A (ja) * 1986-07-16 1988-05-30 Seikosha Co Ltd 電界効果型薄膜トランジスタ
JPH047876A (ja) * 1990-04-25 1992-01-13 Nec Corp 薄膜トランジスタ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63126277A (ja) * 1986-07-16 1988-05-30 Seikosha Co Ltd 電界効果型薄膜トランジスタ
JPH047876A (ja) * 1990-04-25 1992-01-13 Nec Corp 薄膜トランジスタ

Also Published As

Publication number Publication date
JPH0377670B2 (enrdf_load_stackoverflow) 1991-12-11

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