JPS5870567A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS5870567A
JPS5870567A JP56169070A JP16907081A JPS5870567A JP S5870567 A JPS5870567 A JP S5870567A JP 56169070 A JP56169070 A JP 56169070A JP 16907081 A JP16907081 A JP 16907081A JP S5870567 A JPS5870567 A JP S5870567A
Authority
JP
Japan
Prior art keywords
rom
eye
gate
film
ion implantation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56169070A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0328833B2 (https=
Inventor
Tetsuo Fujii
哲夫 藤井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
NipponDenso Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NipponDenso Co Ltd filed Critical NipponDenso Co Ltd
Priority to JP56169070A priority Critical patent/JPS5870567A/ja
Publication of JPS5870567A publication Critical patent/JPS5870567A/ja
Publication of JPH0328833B2 publication Critical patent/JPH0328833B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B20/00—Read-only memory [ROM] devices

Landscapes

  • Read Only Memory (AREA)
  • Design And Manufacture Of Integrated Circuits (AREA)
  • Semiconductor Memories (AREA)
JP56169070A 1981-10-22 1981-10-22 半導体装置の製造方法 Granted JPS5870567A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56169070A JPS5870567A (ja) 1981-10-22 1981-10-22 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56169070A JPS5870567A (ja) 1981-10-22 1981-10-22 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS5870567A true JPS5870567A (ja) 1983-04-27
JPH0328833B2 JPH0328833B2 (https=) 1991-04-22

Family

ID=15879764

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56169070A Granted JPS5870567A (ja) 1981-10-22 1981-10-22 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS5870567A (https=)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6212152A (ja) * 1985-07-09 1987-01-21 Nippon Denso Co Ltd 半導体装置の製造方法
JPS63202061A (ja) * 1987-02-17 1988-08-22 Nec Corp 半導体記憶装置
JPH02209767A (ja) * 1989-02-09 1990-08-21 Fujitsu Ltd 半導体装置の製造方法
KR100401004B1 (ko) * 2001-08-27 2003-10-10 동부전자 주식회사 마스크롬 구조 및 그의 제조방법

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4859783A (https=) * 1971-11-25 1973-08-22
JPS5553454A (en) * 1978-10-16 1980-04-18 Fujitsu Ltd Method for producing semiconductor device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4859783A (https=) * 1971-11-25 1973-08-22
JPS5553454A (en) * 1978-10-16 1980-04-18 Fujitsu Ltd Method for producing semiconductor device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6212152A (ja) * 1985-07-09 1987-01-21 Nippon Denso Co Ltd 半導体装置の製造方法
JPS63202061A (ja) * 1987-02-17 1988-08-22 Nec Corp 半導体記憶装置
JPH02209767A (ja) * 1989-02-09 1990-08-21 Fujitsu Ltd 半導体装置の製造方法
KR100401004B1 (ko) * 2001-08-27 2003-10-10 동부전자 주식회사 마스크롬 구조 및 그의 제조방법

Also Published As

Publication number Publication date
JPH0328833B2 (https=) 1991-04-22

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