JPS5856356A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS5856356A
JPS5856356A JP56155587A JP15558781A JPS5856356A JP S5856356 A JPS5856356 A JP S5856356A JP 56155587 A JP56155587 A JP 56155587A JP 15558781 A JP15558781 A JP 15558781A JP S5856356 A JPS5856356 A JP S5856356A
Authority
JP
Japan
Prior art keywords
photosensitive resin
resin film
pattern
insulating film
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56155587A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6359540B2 (OSRAM
Inventor
Kazuhiko Tsuji
和彦 辻
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP56155587A priority Critical patent/JPS5856356A/ja
Publication of JPS5856356A publication Critical patent/JPS5856356A/ja
Publication of JPS6359540B2 publication Critical patent/JPS6359540B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP56155587A 1981-09-29 1981-09-29 半導体装置の製造方法 Granted JPS5856356A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56155587A JPS5856356A (ja) 1981-09-29 1981-09-29 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56155587A JPS5856356A (ja) 1981-09-29 1981-09-29 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS5856356A true JPS5856356A (ja) 1983-04-04
JPS6359540B2 JPS6359540B2 (OSRAM) 1988-11-21

Family

ID=15609296

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56155587A Granted JPS5856356A (ja) 1981-09-29 1981-09-29 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS5856356A (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62268659A (ja) * 1986-05-19 1987-11-21 Canon Inc 画像記録装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62268659A (ja) * 1986-05-19 1987-11-21 Canon Inc 画像記録装置

Also Published As

Publication number Publication date
JPS6359540B2 (OSRAM) 1988-11-21

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