JPS58215063A - 半導体装置 - Google Patents

半導体装置

Info

Publication number
JPS58215063A
JPS58215063A JP57097311A JP9731182A JPS58215063A JP S58215063 A JPS58215063 A JP S58215063A JP 57097311 A JP57097311 A JP 57097311A JP 9731182 A JP9731182 A JP 9731182A JP S58215063 A JPS58215063 A JP S58215063A
Authority
JP
Japan
Prior art keywords
film
electrode
type
channel
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57097311A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6240864B2 (enrdf_load_stackoverflow
Inventor
Yoshihisa Mizutani
水谷　嘉久
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP57097311A priority Critical patent/JPS58215063A/ja
Publication of JPS58215063A publication Critical patent/JPS58215063A/ja
Publication of JPS6240864B2 publication Critical patent/JPS6240864B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D88/00—Three-dimensional [3D] integrated devices

Landscapes

  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Semiconductor Memories (AREA)
JP57097311A 1982-06-07 1982-06-07 半導体装置 Granted JPS58215063A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57097311A JPS58215063A (ja) 1982-06-07 1982-06-07 半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57097311A JPS58215063A (ja) 1982-06-07 1982-06-07 半導体装置

Publications (2)

Publication Number Publication Date
JPS58215063A true JPS58215063A (ja) 1983-12-14
JPS6240864B2 JPS6240864B2 (enrdf_load_stackoverflow) 1987-08-31

Family

ID=14188939

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57097311A Granted JPS58215063A (ja) 1982-06-07 1982-06-07 半導体装置

Country Status (1)

Country Link
JP (1) JPS58215063A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6116566A (ja) * 1984-07-03 1986-01-24 Toshiba Corp 半導体記憶装置
JPS63124551A (ja) * 1986-11-14 1988-05-28 Nec Corp 半導体集積回路装置
JPS63141349A (ja) * 1986-11-18 1988-06-13 シーメンス、アクチエンゲゼルシヤフト 集積半導体回路とその製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6116566A (ja) * 1984-07-03 1986-01-24 Toshiba Corp 半導体記憶装置
JPS63124551A (ja) * 1986-11-14 1988-05-28 Nec Corp 半導体集積回路装置
JPS63141349A (ja) * 1986-11-18 1988-06-13 シーメンス、アクチエンゲゼルシヤフト 集積半導体回路とその製造方法

Also Published As

Publication number Publication date
JPS6240864B2 (enrdf_load_stackoverflow) 1987-08-31

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