JPS582043A - 多層配線層の形成方法 - Google Patents

多層配線層の形成方法

Info

Publication number
JPS582043A
JPS582043A JP9975581A JP9975581A JPS582043A JP S582043 A JPS582043 A JP S582043A JP 9975581 A JP9975581 A JP 9975581A JP 9975581 A JP9975581 A JP 9975581A JP S582043 A JPS582043 A JP S582043A
Authority
JP
Japan
Prior art keywords
wiring
etching
insulating layer
layer
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9975581A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6364904B2 (enrdf_load_stackoverflow
Inventor
Toshio Kurahashi
倉橋　敏男
Chuichi Takada
高田　忠一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP9975581A priority Critical patent/JPS582043A/ja
Publication of JPS582043A publication Critical patent/JPS582043A/ja
Publication of JPS6364904B2 publication Critical patent/JPS6364904B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP9975581A 1981-06-29 1981-06-29 多層配線層の形成方法 Granted JPS582043A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9975581A JPS582043A (ja) 1981-06-29 1981-06-29 多層配線層の形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9975581A JPS582043A (ja) 1981-06-29 1981-06-29 多層配線層の形成方法

Publications (2)

Publication Number Publication Date
JPS582043A true JPS582043A (ja) 1983-01-07
JPS6364904B2 JPS6364904B2 (enrdf_load_stackoverflow) 1988-12-14

Family

ID=14255795

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9975581A Granted JPS582043A (ja) 1981-06-29 1981-06-29 多層配線層の形成方法

Country Status (1)

Country Link
JP (1) JPS582043A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59225529A (ja) * 1983-06-06 1984-12-18 Toshiba Corp 絶縁層の平坦化方法
JPS62123052A (ja) * 1985-11-25 1987-06-04 松下電工株式会社 繊維セメントスラリ−組成物
JPS63275118A (ja) * 1987-05-07 1988-11-11 Nec Corp 半導体装置の製造方法
JPH02113555A (ja) * 1988-10-21 1990-04-25 Nec Corp 半導体装置の製造方法
KR20180068859A (ko) 2016-12-14 2018-06-22 가부시키가이샤 도판 도모에가와 옵티컬 필름 광학 적층체, 편광판 및 표시 장치

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102241020B1 (ko) * 2020-03-17 2021-04-19 (주)화승코퍼레이션 마모 진행 정도의 단계별 확인이 가능한 컨베이어 벨트

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59225529A (ja) * 1983-06-06 1984-12-18 Toshiba Corp 絶縁層の平坦化方法
JPS62123052A (ja) * 1985-11-25 1987-06-04 松下電工株式会社 繊維セメントスラリ−組成物
JPS63275118A (ja) * 1987-05-07 1988-11-11 Nec Corp 半導体装置の製造方法
JPH02113555A (ja) * 1988-10-21 1990-04-25 Nec Corp 半導体装置の製造方法
KR20180068859A (ko) 2016-12-14 2018-06-22 가부시키가이샤 도판 도모에가와 옵티컬 필름 광학 적층체, 편광판 및 표시 장치

Also Published As

Publication number Publication date
JPS6364904B2 (enrdf_load_stackoverflow) 1988-12-14

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