JPS5815278A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS5815278A
JPS5815278A JP11471881A JP11471881A JPS5815278A JP S5815278 A JPS5815278 A JP S5815278A JP 11471881 A JP11471881 A JP 11471881A JP 11471881 A JP11471881 A JP 11471881A JP S5815278 A JPS5815278 A JP S5815278A
Authority
JP
Japan
Prior art keywords
film
gate electrode
insulating film
insulating
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11471881A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0217931B2 (enrdf_load_stackoverflow
Inventor
Yoshihiko Higa
比嘉　良彦
Akira Takei
武井　朗
Takashi Mitsuida
高 三井田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP11471881A priority Critical patent/JPS5815278A/ja
Publication of JPS5815278A publication Critical patent/JPS5815278A/ja
Publication of JPH0217931B2 publication Critical patent/JPH0217931B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
JP11471881A 1981-07-21 1981-07-21 半導体装置の製造方法 Granted JPS5815278A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11471881A JPS5815278A (ja) 1981-07-21 1981-07-21 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11471881A JPS5815278A (ja) 1981-07-21 1981-07-21 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS5815278A true JPS5815278A (ja) 1983-01-28
JPH0217931B2 JPH0217931B2 (enrdf_load_stackoverflow) 1990-04-24

Family

ID=14644875

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11471881A Granted JPS5815278A (ja) 1981-07-21 1981-07-21 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS5815278A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6068612A (ja) * 1983-09-26 1985-04-19 Oki Electric Ind Co Ltd 半導体素子の製造方法
FR2720331A1 (fr) * 1994-05-27 1995-12-01 Ier Imprimerie à guide mobile pour le support à imprimer.

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6068612A (ja) * 1983-09-26 1985-04-19 Oki Electric Ind Co Ltd 半導体素子の製造方法
FR2720331A1 (fr) * 1994-05-27 1995-12-01 Ier Imprimerie à guide mobile pour le support à imprimer.

Also Published As

Publication number Publication date
JPH0217931B2 (enrdf_load_stackoverflow) 1990-04-24

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