JPS58144841U - 半導体製造装置 - Google Patents

半導体製造装置

Info

Publication number
JPS58144841U
JPS58144841U JP4297182U JP4297182U JPS58144841U JP S58144841 U JPS58144841 U JP S58144841U JP 4297182 U JP4297182 U JP 4297182U JP 4297182 U JP4297182 U JP 4297182U JP S58144841 U JPS58144841 U JP S58144841U
Authority
JP
Japan
Prior art keywords
manufacturing equipment
semiconductor manufacturing
semiconductor wafer
tray
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4297182U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6223087Y2 (enrdf_load_stackoverflow
Inventor
毛利　幹生
Original Assignee
日本電気ホームエレクトロニクス株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電気ホームエレクトロニクス株式会社 filed Critical 日本電気ホームエレクトロニクス株式会社
Priority to JP4297182U priority Critical patent/JPS58144841U/ja
Publication of JPS58144841U publication Critical patent/JPS58144841U/ja
Application granted granted Critical
Publication of JPS6223087Y2 publication Critical patent/JPS6223087Y2/ja
Granted legal-status Critical Current

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  • Delivering By Means Of Belts And Rollers (AREA)
JP4297182U 1982-03-25 1982-03-25 半導体製造装置 Granted JPS58144841U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4297182U JPS58144841U (ja) 1982-03-25 1982-03-25 半導体製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4297182U JPS58144841U (ja) 1982-03-25 1982-03-25 半導体製造装置

Publications (2)

Publication Number Publication Date
JPS58144841U true JPS58144841U (ja) 1983-09-29
JPS6223087Y2 JPS6223087Y2 (enrdf_load_stackoverflow) 1987-06-12

Family

ID=30054069

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4297182U Granted JPS58144841U (ja) 1982-03-25 1982-03-25 半導体製造装置

Country Status (1)

Country Link
JP (1) JPS58144841U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009194376A (ja) * 2008-01-16 2009-08-27 Semiconductor Energy Lab Co Ltd 半導体基板製造装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5121474A (ja) * 1974-08-15 1976-02-20 Mitsubishi Electric Corp Handotaiuehatoriatsukaisochi

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5121474A (ja) * 1974-08-15 1976-02-20 Mitsubishi Electric Corp Handotaiuehatoriatsukaisochi

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009194376A (ja) * 2008-01-16 2009-08-27 Semiconductor Energy Lab Co Ltd 半導体基板製造装置

Also Published As

Publication number Publication date
JPS6223087Y2 (enrdf_load_stackoverflow) 1987-06-12

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