JPS58121638A - ウエ−ハプロ−バ用検針のチエツク方法 - Google Patents

ウエ−ハプロ−バ用検針のチエツク方法

Info

Publication number
JPS58121638A
JPS58121638A JP395382A JP395382A JPS58121638A JP S58121638 A JPS58121638 A JP S58121638A JP 395382 A JP395382 A JP 395382A JP 395382 A JP395382 A JP 395382A JP S58121638 A JPS58121638 A JP S58121638A
Authority
JP
Japan
Prior art keywords
wafer
probe
inspected
probes
checking
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP395382A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6156616B2 (enExample
Inventor
Toyoichi Ichii
市井　豊一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Home Electronics Ltd
NEC Corp
Original Assignee
NEC Home Electronics Ltd
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Home Electronics Ltd, Nippon Electric Co Ltd filed Critical NEC Home Electronics Ltd
Priority to JP395382A priority Critical patent/JPS58121638A/ja
Publication of JPS58121638A publication Critical patent/JPS58121638A/ja
Publication of JPS6156616B2 publication Critical patent/JPS6156616B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07314—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP395382A 1982-01-12 1982-01-12 ウエ−ハプロ−バ用検針のチエツク方法 Granted JPS58121638A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP395382A JPS58121638A (ja) 1982-01-12 1982-01-12 ウエ−ハプロ−バ用検針のチエツク方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP395382A JPS58121638A (ja) 1982-01-12 1982-01-12 ウエ−ハプロ−バ用検針のチエツク方法

Publications (2)

Publication Number Publication Date
JPS58121638A true JPS58121638A (ja) 1983-07-20
JPS6156616B2 JPS6156616B2 (enExample) 1986-12-03

Family

ID=11571464

Family Applications (1)

Application Number Title Priority Date Filing Date
JP395382A Granted JPS58121638A (ja) 1982-01-12 1982-01-12 ウエ−ハプロ−バ用検針のチエツク方法

Country Status (1)

Country Link
JP (1) JPS58121638A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6024030A (ja) * 1983-07-19 1985-02-06 Telmec Co Ltd 半導体ウエハ測定方法
JPS6279640A (ja) * 1985-10-02 1987-04-13 Nippon Kogaku Kk <Nikon> ウエハプロ−バ装置
JPS63265441A (ja) * 1987-04-23 1988-11-01 Tokyo Electron Ltd 測定装置
JPH06151528A (ja) * 1990-12-15 1994-05-31 Tokyo Electron Ltd 半導体ウエハ測定方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6024030A (ja) * 1983-07-19 1985-02-06 Telmec Co Ltd 半導体ウエハ測定方法
JPS6279640A (ja) * 1985-10-02 1987-04-13 Nippon Kogaku Kk <Nikon> ウエハプロ−バ装置
JPS63265441A (ja) * 1987-04-23 1988-11-01 Tokyo Electron Ltd 測定装置
JPH06151528A (ja) * 1990-12-15 1994-05-31 Tokyo Electron Ltd 半導体ウエハ測定方法

Also Published As

Publication number Publication date
JPS6156616B2 (enExample) 1986-12-03

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