JPS5778181A - Semiconductor variable capacity element - Google Patents

Semiconductor variable capacity element

Info

Publication number
JPS5778181A
JPS5778181A JP55154861A JP15486180A JPS5778181A JP S5778181 A JPS5778181 A JP S5778181A JP 55154861 A JP55154861 A JP 55154861A JP 15486180 A JP15486180 A JP 15486180A JP S5778181 A JPS5778181 A JP S5778181A
Authority
JP
Japan
Prior art keywords
electrode
thickness
substrate
tox
oxidized film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55154861A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0213465B2 (enrdf_load_stackoverflow
Inventor
Yoshio Hattori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Priority to JP55154861A priority Critical patent/JPS5778181A/ja
Publication of JPS5778181A publication Critical patent/JPS5778181A/ja
Publication of JPH0213465B2 publication Critical patent/JPH0213465B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D1/00—Resistors, capacitors or inductors
    • H10D1/60—Capacitors
    • H10D1/62—Capacitors having potential barriers
    • H10D1/64—Variable-capacitance diodes, e.g. varactors 

Landscapes

  • Semiconductor Integrated Circuits (AREA)
JP55154861A 1980-11-04 1980-11-04 Semiconductor variable capacity element Granted JPS5778181A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55154861A JPS5778181A (en) 1980-11-04 1980-11-04 Semiconductor variable capacity element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55154861A JPS5778181A (en) 1980-11-04 1980-11-04 Semiconductor variable capacity element

Publications (2)

Publication Number Publication Date
JPS5778181A true JPS5778181A (en) 1982-05-15
JPH0213465B2 JPH0213465B2 (enrdf_load_stackoverflow) 1990-04-04

Family

ID=15593511

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55154861A Granted JPS5778181A (en) 1980-11-04 1980-11-04 Semiconductor variable capacity element

Country Status (1)

Country Link
JP (1) JPS5778181A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0316192A3 (en) * 1987-11-11 1990-12-05 Seiko Instruments Inc. Semi-conductor variable capacitance element
US5248891A (en) * 1988-03-25 1993-09-28 Hiroshi Takato High integration semiconductor device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53115185A (en) * 1977-03-17 1978-10-07 Sanyo Electric Co Ltd Memory type variable capacitive device
JPS53135235A (en) * 1977-04-30 1978-11-25 Toshiba Corp Nonvolatile memory array

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53115185A (en) * 1977-03-17 1978-10-07 Sanyo Electric Co Ltd Memory type variable capacitive device
JPS53135235A (en) * 1977-04-30 1978-11-25 Toshiba Corp Nonvolatile memory array

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0316192A3 (en) * 1987-11-11 1990-12-05 Seiko Instruments Inc. Semi-conductor variable capacitance element
US5248891A (en) * 1988-03-25 1993-09-28 Hiroshi Takato High integration semiconductor device

Also Published As

Publication number Publication date
JPH0213465B2 (enrdf_load_stackoverflow) 1990-04-04

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