JPS575369A - Semiconductor variable capacitance element - Google Patents

Semiconductor variable capacitance element

Info

Publication number
JPS575369A
JPS575369A JP7878880A JP7878880A JPS575369A JP S575369 A JPS575369 A JP S575369A JP 7878880 A JP7878880 A JP 7878880A JP 7878880 A JP7878880 A JP 7878880A JP S575369 A JPS575369 A JP S575369A
Authority
JP
Japan
Prior art keywords
electrode
substrate
variable capacitance
capacitance element
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7878880A
Other languages
Japanese (ja)
Inventor
Yoshio Hattori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Priority to JP7878880A priority Critical patent/JPS575369A/en
Publication of JPS575369A publication Critical patent/JPS575369A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76Unipolar devices, e.g. field effect transistors
    • H01L29/772Field effect transistors
    • H01L29/78Field effect transistors with field effect produced by an insulated gate
    • H01L29/788Field effect transistors with field effect produced by an insulated gate with floating gate
    • H01L29/7881Programmable transistors with only two possible levels of programmation

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Semiconductor Integrated Circuits (AREA)

Abstract

PURPOSE:To arbitrarily and simply vary the capacity of a semiconductor variable capacitance element by forming a floating electrode insulated externally and covered with an insulating film on a semiconductor substrate and charging the electrode. CONSTITUTION:A floating electrode 3 insulated externally and covered with oxidized insulating film 2 is formed on a semiconductor substrate 1, and an electrode 4 capacitively coupled with the electrode 3 is formed on the electrode 3. An impurity diffused layer 6 of reverse conductive type to the substrate 1 is formed on the substrate 1, and is contacted partly of the electrode 3 via an insulating oxidized film 5. The surface of the substrate 1 can be inverted, depleted, or stored in accordance with the charging amount of the electrode 3. The capacity between the electrode 4 and the substrate 1 is varied in accordance with the inverted, depleted or stored state of the surface of the substrate 1.
JP7878880A 1980-06-11 1980-06-11 Semiconductor variable capacitance element Pending JPS575369A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7878880A JPS575369A (en) 1980-06-11 1980-06-11 Semiconductor variable capacitance element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7878880A JPS575369A (en) 1980-06-11 1980-06-11 Semiconductor variable capacitance element

Publications (1)

Publication Number Publication Date
JPS575369A true JPS575369A (en) 1982-01-12

Family

ID=13671613

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7878880A Pending JPS575369A (en) 1980-06-11 1980-06-11 Semiconductor variable capacitance element

Country Status (1)

Country Link
JP (1) JPS575369A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53115185A (en) * 1977-03-17 1978-10-07 Sanyo Electric Co Ltd Memory type variable capacitive device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53115185A (en) * 1977-03-17 1978-10-07 Sanyo Electric Co Ltd Memory type variable capacitive device

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