JPS575346A - Semiconductor device and manufacture thereof - Google Patents

Semiconductor device and manufacture thereof

Info

Publication number
JPS575346A
JPS575346A JP7909280A JP7909280A JPS575346A JP S575346 A JPS575346 A JP S575346A JP 7909280 A JP7909280 A JP 7909280A JP 7909280 A JP7909280 A JP 7909280A JP S575346 A JPS575346 A JP S575346A
Authority
JP
Japan
Prior art keywords
layer
oxidized film
wiring
substrate
oxidized
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7909280A
Other languages
English (en)
Other versions
JPS6331938B2 (ja
Inventor
Masayoshi Sasaki
Hiroshi Tetsuda
Shintaro Ushio
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP7909280A priority Critical patent/JPS575346A/ja
Publication of JPS575346A publication Critical patent/JPS575346A/ja
Publication of JPS6331938B2 publication Critical patent/JPS6331938B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP7909280A 1980-06-13 1980-06-13 Semiconductor device and manufacture thereof Granted JPS575346A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7909280A JPS575346A (en) 1980-06-13 1980-06-13 Semiconductor device and manufacture thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7909280A JPS575346A (en) 1980-06-13 1980-06-13 Semiconductor device and manufacture thereof

Publications (2)

Publication Number Publication Date
JPS575346A true JPS575346A (en) 1982-01-12
JPS6331938B2 JPS6331938B2 (ja) 1988-06-27

Family

ID=13680235

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7909280A Granted JPS575346A (en) 1980-06-13 1980-06-13 Semiconductor device and manufacture thereof

Country Status (1)

Country Link
JP (1) JPS575346A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5934663A (ja) * 1982-08-21 1984-02-25 Mitsubishi Electric Corp Ｍｉｓ電界効果型トランジスタ
JPS5943552A (ja) * 1982-07-30 1984-03-10 モトロ−ラ・インコ−ポレ−テツド 集積回路用低抵抗埋込形電力バス及びその形成法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4841683A (ja) * 1971-09-27 1973-06-18

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4841683A (ja) * 1971-09-27 1973-06-18

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5943552A (ja) * 1982-07-30 1984-03-10 モトロ−ラ・インコ−ポレ−テツド 集積回路用低抵抗埋込形電力バス及びその形成法
JPS5934663A (ja) * 1982-08-21 1984-02-25 Mitsubishi Electric Corp Ｍｉｓ電界効果型トランジスタ

Also Published As

Publication number Publication date
JPS6331938B2 (ja) 1988-06-27

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