JPS5749233A - Laminar structure resist and forming method for pattern thereof - Google Patents
Laminar structure resist and forming method for pattern thereofInfo
- Publication number
- JPS5749233A JPS5749233A JP12570480A JP12570480A JPS5749233A JP S5749233 A JPS5749233 A JP S5749233A JP 12570480 A JP12570480 A JP 12570480A JP 12570480 A JP12570480 A JP 12570480A JP S5749233 A JPS5749233 A JP S5749233A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- resist
- laminar structure
- coated
- pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0272—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers for lift-off processes
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Electron Beam Exposure (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12570480A JPS5749233A (en) | 1980-09-08 | 1980-09-08 | Laminar structure resist and forming method for pattern thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12570480A JPS5749233A (en) | 1980-09-08 | 1980-09-08 | Laminar structure resist and forming method for pattern thereof |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5749233A true JPS5749233A (en) | 1982-03-23 |
Family
ID=14916652
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12570480A Pending JPS5749233A (en) | 1980-09-08 | 1980-09-08 | Laminar structure resist and forming method for pattern thereof |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5749233A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6113628A (ja) * | 1984-06-27 | 1986-01-21 | インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション | リフト・オフ・マスクの形成方法 |
-
1980
- 1980-09-08 JP JP12570480A patent/JPS5749233A/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6113628A (ja) * | 1984-06-27 | 1986-01-21 | インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション | リフト・オフ・マスクの形成方法 |
JPH0562815B2 (ja) * | 1984-06-27 | 1993-09-09 | Ibm |
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