JPS5711450A - Manufacture of fluorescent display tube - Google Patents
Manufacture of fluorescent display tubeInfo
- Publication number
- JPS5711450A JPS5711450A JP8538180A JP8538180A JPS5711450A JP S5711450 A JPS5711450 A JP S5711450A JP 8538180 A JP8538180 A JP 8538180A JP 8538180 A JP8538180 A JP 8538180A JP S5711450 A JPS5711450 A JP S5711450A
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- film
- wiring
- resist film
- wiring pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
Abstract
PURPOSE:To stabilize the wiring conductor pattern and to improve the production efficiency by producing the pattern through a way in which a resist film is formed on the surface of an Al film formed on an insulating substrate, a wiring pattern is formed by photograph method, and the Al film is removed except the wiring pattern by etching method. CONSTITUTION:A resist film 8 is formed on an Al film 7 formed on an insulating substrate 1. A wiring pattern film 9 on which a wiring pattern is formed is closely fitted on the surface of the resist film 8, exposed, and the resist film 8 is developed, and washed with water to form a wiring pattern of the resist film 8. Then the Al film except the part of the pattern 8a is removed by plasma etching method, and the pattern 8a is removed to form an Al wiring conductor pattern 2. Thus the control of the wiring pattern dimension can be made easily compared with a conventional method to form Al wiring conductor pattern using a metal mask, and a material used in evaporation or spattering will not enter into the backside, a conductor pattern with high stability and reliability can be manufactured effectively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8538180A JPS5711450A (en) | 1980-06-24 | 1980-06-24 | Manufacture of fluorescent display tube |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8538180A JPS5711450A (en) | 1980-06-24 | 1980-06-24 | Manufacture of fluorescent display tube |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5711450A true JPS5711450A (en) | 1982-01-21 |
Family
ID=13857151
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8538180A Pending JPS5711450A (en) | 1980-06-24 | 1980-06-24 | Manufacture of fluorescent display tube |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5711450A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100500117B1 (en) * | 2001-08-03 | 2005-07-11 | 캐논 가부시끼가이샤 | Method of manufacturing member pattern and method of manufacturing wiring, circuit substrate, electron source, and image-forming apparatus |
| KR100599769B1 (en) * | 2000-02-02 | 2006-07-12 | 삼성에스디아이 주식회사 | Method for printing thin film pattern of flat panel display device and field emission display device having emitter made by the same method |
-
1980
- 1980-06-24 JP JP8538180A patent/JPS5711450A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100599769B1 (en) * | 2000-02-02 | 2006-07-12 | 삼성에스디아이 주식회사 | Method for printing thin film pattern of flat panel display device and field emission display device having emitter made by the same method |
| KR100500117B1 (en) * | 2001-08-03 | 2005-07-11 | 캐논 가부시끼가이샤 | Method of manufacturing member pattern and method of manufacturing wiring, circuit substrate, electron source, and image-forming apparatus |
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