JPS52120770A - Thin film formation method - Google Patents

Thin film formation method

Info

Publication number
JPS52120770A
JPS52120770A JP3715376A JP3715376A JPS52120770A JP S52120770 A JPS52120770 A JP S52120770A JP 3715376 A JP3715376 A JP 3715376A JP 3715376 A JP3715376 A JP 3715376A JP S52120770 A JPS52120770 A JP S52120770A
Authority
JP
Japan
Prior art keywords
thin film
film formation
formation method
substrate
enhance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3715376A
Other languages
Japanese (ja)
Inventor
Yoshio Honma
Hisao Nozawa
Yukiyoshi Harada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3715376A priority Critical patent/JPS52120770A/en
Publication of JPS52120770A publication Critical patent/JPS52120770A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: To enhance the adhesion intensity between the substrate and metal film by coating metal layer on the semiconductor substrate with photo resist pattern formed through ion beam evaporation method using ion acceleration voltage of over 50V substantially and then by removing the resist.
COPYRIGHT: (C)1977,JPO&Japio
JP3715376A 1976-04-05 1976-04-05 Thin film formation method Pending JPS52120770A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3715376A JPS52120770A (en) 1976-04-05 1976-04-05 Thin film formation method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3715376A JPS52120770A (en) 1976-04-05 1976-04-05 Thin film formation method

Publications (1)

Publication Number Publication Date
JPS52120770A true JPS52120770A (en) 1977-10-11

Family

ID=12489653

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3715376A Pending JPS52120770A (en) 1976-04-05 1976-04-05 Thin film formation method

Country Status (1)

Country Link
JP (1) JPS52120770A (en)

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