JPS57204152A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS57204152A
JPS57204152A JP8916581A JP8916581A JPS57204152A JP S57204152 A JPS57204152 A JP S57204152A JP 8916581 A JP8916581 A JP 8916581A JP 8916581 A JP8916581 A JP 8916581A JP S57204152 A JPS57204152 A JP S57204152A
Authority
JP
Japan
Prior art keywords
layer
films
film
layers
patterns
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8916581A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6248381B2 (enrdf_load_stackoverflow
Inventor
Yorihiro Uchiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP8916581A priority Critical patent/JPS57204152A/ja
Publication of JPS57204152A publication Critical patent/JPS57204152A/ja
Publication of JPS6248381B2 publication Critical patent/JPS6248381B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Formation Of Insulating Films (AREA)
JP8916581A 1981-06-10 1981-06-10 Semiconductor device Granted JPS57204152A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8916581A JPS57204152A (en) 1981-06-10 1981-06-10 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8916581A JPS57204152A (en) 1981-06-10 1981-06-10 Semiconductor device

Publications (2)

Publication Number Publication Date
JPS57204152A true JPS57204152A (en) 1982-12-14
JPS6248381B2 JPS6248381B2 (enrdf_load_stackoverflow) 1987-10-13

Family

ID=13963195

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8916581A Granted JPS57204152A (en) 1981-06-10 1981-06-10 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS57204152A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58107653A (ja) * 1981-12-21 1983-06-27 Nec Corp 半導体装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS558035A (en) * 1978-06-30 1980-01-21 Nec Corp Semiconductor

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS558035A (en) * 1978-06-30 1980-01-21 Nec Corp Semiconductor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58107653A (ja) * 1981-12-21 1983-06-27 Nec Corp 半導体装置

Also Published As

Publication number Publication date
JPS6248381B2 (enrdf_load_stackoverflow) 1987-10-13

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