JPS57204152A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS57204152A
JPS57204152A JP8916581A JP8916581A JPS57204152A JP S57204152 A JPS57204152 A JP S57204152A JP 8916581 A JP8916581 A JP 8916581A JP 8916581 A JP8916581 A JP 8916581A JP S57204152 A JPS57204152 A JP S57204152A
Authority
JP
Japan
Prior art keywords
layer
films
film
layers
patterns
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8916581A
Other languages
Japanese (ja)
Other versions
JPS6248381B2 (en
Inventor
Yorihiro Uchiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP8916581A priority Critical patent/JPS57204152A/en
Publication of JPS57204152A publication Critical patent/JPS57204152A/en
Publication of JPS6248381B2 publication Critical patent/JPS6248381B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Formation Of Insulating Films (AREA)

Abstract

PURPOSE:To prevent the exfoliation of the edge section of a polyimide insulating film from a semiconductor layer or an inorganic insulator layer by positioning a substance layer having large adhesive property at a region in which the edge section and the semiconductor layer or the inorganic insulating film contact. CONSTITUTION:The lower layer insulating films 17 consisting of phosphorus silicide glass films, etc. are formed onto an N type Si epitaxial layer 13'. The first layer Al patterns 19a, 19b, 19c are shaped onto the films 17, and the polyimide layer insulating films 20 are further formed onto the patterns. The second layer Al wiring patterns 21a, 21b are shaped onto the films 20, and the surface is coated with a cover insulating film 23. Accordingly, the edge section 24 of the film 20 is coated with the layer 13' and the film 23 through the Al existing patterns 19b, 21b. The films 20 are not exfoliated from the layer 13' and the film 23 due to a thermal impact, etc. because adhesive strength to the Al layers of the polyimide layers is remarkably larger than the semiconductor layers or the inorganic insulator layers.
JP8916581A 1981-06-10 1981-06-10 Semiconductor device Granted JPS57204152A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8916581A JPS57204152A (en) 1981-06-10 1981-06-10 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8916581A JPS57204152A (en) 1981-06-10 1981-06-10 Semiconductor device

Publications (2)

Publication Number Publication Date
JPS57204152A true JPS57204152A (en) 1982-12-14
JPS6248381B2 JPS6248381B2 (en) 1987-10-13

Family

ID=13963195

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8916581A Granted JPS57204152A (en) 1981-06-10 1981-06-10 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS57204152A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58107653A (en) * 1981-12-21 1983-06-27 Nec Corp Semiconductor device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS558035A (en) * 1978-06-30 1980-01-21 Nec Corp Semiconductor

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS558035A (en) * 1978-06-30 1980-01-21 Nec Corp Semiconductor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58107653A (en) * 1981-12-21 1983-06-27 Nec Corp Semiconductor device

Also Published As

Publication number Publication date
JPS6248381B2 (en) 1987-10-13

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