JPS57204152A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS57204152A JPS57204152A JP8916581A JP8916581A JPS57204152A JP S57204152 A JPS57204152 A JP S57204152A JP 8916581 A JP8916581 A JP 8916581A JP 8916581 A JP8916581 A JP 8916581A JP S57204152 A JPS57204152 A JP S57204152A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- films
- film
- layers
- patterns
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Formation Of Insulating Films (AREA)
Abstract
PURPOSE:To prevent the exfoliation of the edge section of a polyimide insulating film from a semiconductor layer or an inorganic insulator layer by positioning a substance layer having large adhesive property at a region in which the edge section and the semiconductor layer or the inorganic insulating film contact. CONSTITUTION:The lower layer insulating films 17 consisting of phosphorus silicide glass films, etc. are formed onto an N type Si epitaxial layer 13'. The first layer Al patterns 19a, 19b, 19c are shaped onto the films 17, and the polyimide layer insulating films 20 are further formed onto the patterns. The second layer Al wiring patterns 21a, 21b are shaped onto the films 20, and the surface is coated with a cover insulating film 23. Accordingly, the edge section 24 of the film 20 is coated with the layer 13' and the film 23 through the Al existing patterns 19b, 21b. The films 20 are not exfoliated from the layer 13' and the film 23 due to a thermal impact, etc. because adhesive strength to the Al layers of the polyimide layers is remarkably larger than the semiconductor layers or the inorganic insulator layers.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8916581A JPS57204152A (en) | 1981-06-10 | 1981-06-10 | Semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8916581A JPS57204152A (en) | 1981-06-10 | 1981-06-10 | Semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57204152A true JPS57204152A (en) | 1982-12-14 |
JPS6248381B2 JPS6248381B2 (en) | 1987-10-13 |
Family
ID=13963195
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8916581A Granted JPS57204152A (en) | 1981-06-10 | 1981-06-10 | Semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57204152A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58107653A (en) * | 1981-12-21 | 1983-06-27 | Nec Corp | Semiconductor device |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS558035A (en) * | 1978-06-30 | 1980-01-21 | Nec Corp | Semiconductor |
-
1981
- 1981-06-10 JP JP8916581A patent/JPS57204152A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS558035A (en) * | 1978-06-30 | 1980-01-21 | Nec Corp | Semiconductor |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58107653A (en) * | 1981-12-21 | 1983-06-27 | Nec Corp | Semiconductor device |
Also Published As
Publication number | Publication date |
---|---|
JPS6248381B2 (en) | 1987-10-13 |
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