JPS57184234A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS57184234A JPS57184234A JP6900881A JP6900881A JPS57184234A JP S57184234 A JPS57184234 A JP S57184234A JP 6900881 A JP6900881 A JP 6900881A JP 6900881 A JP6900881 A JP 6900881A JP S57184234 A JPS57184234 A JP S57184234A
- Authority
- JP
- Japan
- Prior art keywords
- wiring
- film
- thickness
- silicon
- metallic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE:To obtain wiring in which breaking at a stage section is not generated by coating a metallic film as a wiring material with silicon thinner than the thickness of the metallic film, reacting the metallic film and a silicon film through heat treatment and forming wiring. CONSTITUTION:An N<+> diffusion layer 102 is formed onto a P type Si substrate 100, a layer insulating film 104 is further shaped onto the layer 102, a contact hole 105 is formed to the insulating film, Al 106 as the metallic wiring material is coated through an evaporation method, the silicon 107 with the one fourth or more thickness of the thickness of the metallic film is coated through a plasma growth method, the surface is patterned, and Al and Si are reacted through heat treatment and the wiring is formed. Accordingly, the disconnecting section of Al is connected by the eutectoid of Al and Si, and disconnection is not generated at the stage section.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6900881A JPS57184234A (en) | 1981-05-08 | 1981-05-08 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6900881A JPS57184234A (en) | 1981-05-08 | 1981-05-08 | Manufacture of semiconductor device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS57184234A true JPS57184234A (en) | 1982-11-12 |
Family
ID=13390132
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6900881A Pending JPS57184234A (en) | 1981-05-08 | 1981-05-08 | Manufacture of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57184234A (en) |
-
1981
- 1981-05-08 JP JP6900881A patent/JPS57184234A/en active Pending
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