JPS57199238A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS57199238A JPS57199238A JP8476081A JP8476081A JPS57199238A JP S57199238 A JPS57199238 A JP S57199238A JP 8476081 A JP8476081 A JP 8476081A JP 8476081 A JP8476081 A JP 8476081A JP S57199238 A JPS57199238 A JP S57199238A
- Authority
- JP
- Japan
- Prior art keywords
- film
- insulation film
- wiring layer
- metal wiring
- semiconductor substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE:To avoid discontinuity by forming a metal wiring layer after a surface of an insulation layer on a semiconductor substrate is made uniform by etching. CONSTITUTION:When a metal wiring layer is formed on a semiconductor substrate 1 in which the first conductive type diffusion regions 5 and 6 are formed and on a surface of which a thick inusltion film 2a and a thin insulation film 2b are formed, a portion of the thick insulation film 2a is removed to the same thickness as the thin insulation film 2b on the regions 5 and 6 by using a photoresist film 7. The metal film is formed on a uniform insulation film 2c by deposition or sputtering and patterned to form an electrode 3. Thus, as the metal wiring layer is formed uniformly, discontiniuty such as breakage at the difference in level is avoided.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8476081A JPS57199238A (en) | 1981-06-02 | 1981-06-02 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8476081A JPS57199238A (en) | 1981-06-02 | 1981-06-02 | Manufacture of semiconductor device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS57199238A true JPS57199238A (en) | 1982-12-07 |
Family
ID=13839634
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8476081A Pending JPS57199238A (en) | 1981-06-02 | 1981-06-02 | Manufacture of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57199238A (en) |
-
1981
- 1981-06-02 JP JP8476081A patent/JPS57199238A/en active Pending
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