JPS55111163A - Semiconductor device and manufacturing method thereof - Google Patents
Semiconductor device and manufacturing method thereofInfo
- Publication number
- JPS55111163A JPS55111163A JP1926279A JP1926279A JPS55111163A JP S55111163 A JPS55111163 A JP S55111163A JP 1926279 A JP1926279 A JP 1926279A JP 1926279 A JP1926279 A JP 1926279A JP S55111163 A JPS55111163 A JP S55111163A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- insulating film
- conductor layer
- insulating
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
Abstract
PURPOSE: To prevent the corrosion of an electrode on a semiconductor substrate due to invading moisture or the like and raise humidity resistance, by coating a conductor layer and an insulating layer on the electrode.
CONSTITUTION: An opening 3 is provided through the first insulating film 2 on a semiconductor substrate 1. An electrode 4 of aluminum or the like is bonded on the substrate 1 through the opening 3. The second insulating film 5 is made of SiO2, Si3N4 or the like on the electrode. A conductor layer 8 of aluminum or the like is provided on the second insulating film 5 to face the electrode 4 across the film. The third insulating layer 9 of Al2O3 or the like is provided all over the conductor layer 8 and the second insulating film 5. As a result, a shoulder 7a corresponding to the edge of the electrode 4 is formed with a double construction, a possible crack in the insulating layer 9 cannot reach the electrode 4 and the electrode is protected from corrosion due to invading moisture or the like.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1926279A JPS55111163A (en) | 1979-02-20 | 1979-02-20 | Semiconductor device and manufacturing method thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1926279A JPS55111163A (en) | 1979-02-20 | 1979-02-20 | Semiconductor device and manufacturing method thereof |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS55111163A true JPS55111163A (en) | 1980-08-27 |
Family
ID=11994517
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1926279A Pending JPS55111163A (en) | 1979-02-20 | 1979-02-20 | Semiconductor device and manufacturing method thereof |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55111163A (en) |
-
1979
- 1979-02-20 JP JP1926279A patent/JPS55111163A/en active Pending
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